林育琼
,
冯仕猛
,
王坤霞
,
裴俊
,
刘绍军
,
刘峰
材料科学与工程学报
本文提出两步法制备多晶硅表面绒面技术,用两次化学腐蚀修饰多晶硅片的表面。实验中首先采用腐蚀液HF/NaNO2/H2O对多晶硅表面进行腐蚀,然后采用腐蚀液HF/HNO3/（NH4）2C2O4/H2O对其表面进一步修饰。通过多晶硅SEM表面形貌图分析,两步法修饰的多晶硅表面有形状如蚯蚓状的腐蚀坑,腐蚀坑的深度和分布密度相对较大。通过反射谱分析了多晶硅片表面陷光效果,并与用其它方法修饰的硅表面陷光效果进行了对比,与传统配方HF/HNO3/H2O获得的多晶硅表面相比,综合平均反射率下降了7%左右。这种方法获得的多晶硅表面能有效收集太阳光,有利于提高太阳能电池的转换效率。
关键词:
酸腐蚀法
,
表面结构
,
陷光效应
,
反射率
L.Wang
金属学报(英文版)
An isotropic etching technique of texturing silicon solar cells has been applied to polycrystalline silicon wafers with different acid concentrations. Optimal etching conditions have been determined by etching rate calculation, scanning electron microscope (SEM) image and reflectance measurement. The surface morphology of the textured wafers varies in accordance with the different etchant concentration which in turn leads to the dissimilarity of etching speed. Textured polycrystalline silicon wafer surfaces display randomly located etched pits which can reduce the surface reflection and enhance the light absorption. The special relationship between reflectivity and etching rate was studied. Reflectance measurements show that isotropic texturing is one of the suitable techniques for texturing polycrys talline silicon wafers and benefits solar cells performances.
关键词:
texturing
,
null
,
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