FENG Zhongchao GUO Liang LIANG Yong HAN Jian HOU Wanliang NING Xiaoguang Institute of Metal Research
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Academia Sinica
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Shenyang
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China Associate Professor
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Institute of Metal Research
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Academia Sinica
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Shenyang 110015
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China
金属学报(英文版)
A superhard α-Si_3N_4 film,deposited on metal substrate,was produced by laser chemical vapor deposition adopting a kW-level high power CO_2 laser.Most films are composed of fine Si_3N_4 partieles.They join the metal substrate in strong bond.The films have super hardness,excellent resistance to wear and corrosion,etc.Their thickness may be controlled within 5-30 μm.
关键词:
laser chemical vapour deposition
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null
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null
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null
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冯钟潮
,
郭良
,
梁勇
,
韩健
,
侯万良
,
宁小光
金属学报
用大功率(kW级)CO_2激光在金属基材上通过化学气相沉积获得α-Si_3N_4膜。膜层多为细小的Si_3N_4颗粒组成,与基材有良好的结合,具有超硬和优良的耐磨抗蚀等性能,厚度在5—30μm范围内可控。
关键词:
激光化学气相沉积
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Si_3N_4 film
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microstructure
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hardness
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wear resistance
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corrosion resistance
