史冰川
,
董俊
,
李昆
,
黄磊
,
亢若谷
,
邱建备
材料科学与工程学报
doi:10.14136/j.cnki.issn 1673-2812.2016.03.037
本文介绍了改良西门子法多晶硅生产中的硅芯制备技术,包括区熔法硅芯制备技术和切割法硅芯制备技术.简要介绍了两种硅芯制备技术的工艺流程,并对两种不同技术路线制备硅芯过程中的杂质分凝、挥发及坩埚污染进行了比较.根据分析结果,采用区熔硅芯能在一定程度上降低硅芯对硅棒的杂质贡献.
关键词:
硅芯
,
杂质分凝
,
杂质挥发
,
坩埚污染
XIA Lifang MA Xinxin Harbin Institute of Technology
,
Harbin
,
China
金属学报(英文版)
This paper deals with the cause of intergranular fracture occurred in the retained austenitic region in plasma carburized layer.The results show that the presence of retained austenite, which has a good effect on the impact toughness,has no relation to this embrittlement.Analy- sis by Auger electron spectroscopy shows that the impurities S and P segregate at the grain boundaries is the main reason of the intergranular embrittlement in carburized layer. However,the segregation of P and S can be removed by reheating and quenching treatment.
关键词:
plasma carburizing
,
null
,
null
,
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