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溅射NdFeB薄膜合金的磁各向异性

顾本喜 , 翟宏如 , H.HOMBURG , S.METHFESSEL

金属学报

用RF溅射方法在不同的基片温度下制备了非晶态和晶态NdFeB溥膜合金。研究了薄膜合金的磁各向异性。在600℃溅射得到的晶态样品具有强的垂直各向异性和高的矫顽力。由非晶态晶化得到的晶态合金也呈现了较强的垂直各向异性。

关键词: NdFeB薄膜合金 , film alloy

MAGNETIC ANISOTRIPY IN SPUTTERED NdFeB FILMS

Gu Benxi Zhai Hongru Nanjing University , Nanjing , ChinaH.Homburg S.Methfessel Ruhr-University Bochum , Germany

金属学报(英文版)

The amorphous and crystalline NdFeB films were prepared by RF sputtering at different substrate temperatures.The crystalline specimens,prepared at 600℃ have strong perpendicu- lar anisotropy and high coercivity.And the cystallized alloy from amorphous state also has strong perpendicular anisotripy.

关键词: NdFeB , null , null

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