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Microstructural characteristics of epitaxial BaSrNb0.3Ti0.7O3 film

Li′na CHENG

材料科学技术(英文)

Microstructural characteristics in the BaSrNb0:3Ti0:7O3 thin film, grown on SrTiO3 substrate by computercontrolled laser molecular beam epitaxy, were characterized by means of transmission electron microscopy (TEM). It is found that the film is single-crystallized and epitaxially grown on the SrTiO3 substrate forming a flat and distinct interface. Anti-phase domains were identified, and the crystallographic features of mismatch dislocations at the interface between film and substrate were clarified. The high conductivity of the present film was discussed from the viewpoint of Nb dopant and the nitrogen atmosphere.

关键词: BaSrNb0.3Ti0.7O3 thin film , thin , film , epitaxial , gro

H-plasma In-situ Cleaning and Lattice Damage Elimination

Chenguang GONG+ , Fuchu SHEN , Biguang YE , Jian CHEN , Zhenjiang University , Hangzhou , 310027 , China

材料科学技术(英文)

This article discusses the silicon lattice damage induced during H-plasma in-situ cleaning and finds that the substrate temperature, plasma power, processing time, all affect the extent of the distortion of the surface and its curability.

关键词: H-plasma cleaning , null , null , null

高温超导YBa2Cu3O7-δ-Y2O3多层薄膜的制备及性能表征

刘宇 , 陈星斌 , 陈金清 , 姚文俐 , 刘鲁峰 , 杜国平

低温物理学报

采用脉冲激光沉积技术(PLD)在LaAlO3(100)单晶衬底上外延生长YBa2Cu3O7-δ-Y2O3多层薄膜,用X射线衍射技术(XRD)分析薄膜的物相结构和外延特性,通过原子力显微镜(AFM)观察薄膜的表面形貌.本文主要研究了最佳工艺参数下交替生长多层YBCO-Y2O3膜的超导性能.结果表明,WBa2Cu3O7-δ-Y2O3薄膜为纯c轴取向外延生长,临界电流密度Jc(H=0或H//C)均高于纯YBCO薄膜,纳米Y2O3起到磁通钉扎中心作用.

关键词: 高温超导薄膜 , PLD , Y2O3 , 外延

衬底材料对Ba0.6Sr0.4TiO3薄膜介电性能的影响

娄建忠 , 李振娜 , 方晓燕 , 代秀红 , 宋安英 , 宋建民 , 刘保亭

人工晶体学报

采用脉冲激光沉积系统分别在LaAlO3(001)和MgO(001)衬底上沉积了Ba06Sr04TiO3(BST)薄膜,以Pt做电极分别构架了Pt/BST/MgO和Pt/BST/LaAlO3叉指电容器.利用X射线衍射仪、原子力显微镜和Aglient E4980LCR表分别对两种薄膜的结构、表面形貌和介电特性进行表征.研究发现:两种衬底都可以实现BST(001)薄膜的外延生长,MgO和LaAlO3衬底上BST薄膜的晶粒尺寸分别为52 nm和42 nm.在室温40 V偏置电压下,Pt/BST/MgO和Pt/BST/LaAlO3的调谐率分别为39.68%和29.55%,最低损耗分别为0.029和0.053.这说明衬底材料的晶格常数不同,最终导致了BST薄膜介电性能的不同.

关键词: 脉冲激光沉积 , Ba0.6Sr0.4TiO3薄膜 , 外延 , 介电性能

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