Jun ZOU
,
Shengming ZHOU
材料科学技术（英文）
About Φ45 mm LiAlO2 single crystal was grown by Czochralski (Cz) technique. However, the full-width at half-maximum (FWHM) value was high to 116.9 arcsec. After three vapor transport equilibration (VTE) processes, we can obtain high-quality LiAlO2 slice with the FWHM value of 44.2 arcsec. ZnO films were fabricated on as-grown slices and after-VTE ones by pulsed laser deposition (PLD). It was found that ZnO films on the two slices have similar crystallinity, optical transmittance and optical band gap at room temperature. These results not only show that LAO substrate is suitable for ZnO growth, but also prove that the crystal quality of LAO substrate slightly affects the structural and optical properties of ZnO film.
关键词:
Crystal structure
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null
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null
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杨琼
,
王传彬
,
章嵩
,
张东明
,
沈强
,
张联盟
表面技术
doi:10.3969/j.issn.1001-3660.2010.01.017
采用脉冲激光沉积技术,在Si(100)基片上制备了BCN薄膜,研究了沉积温度和退火处理对BCN薄膜组分和结构的影响.利用傅里叶变换红外光谱(FTIR)和X射线光电子能谱(XPS)对制备的BCN薄膜进行了表征.结果表明:沉积温度升高时,BCN薄膜的组分无明显改变.所制备的BCN薄膜包含B-N,C-B和C-N化学键,是由杂化的B-C-N键构成的化合物.真空退火温度为700 ℃时,BCN薄膜结构稳定;大气退火温度达到600 ℃时,BCN薄膜表面发生氧化分解,同时有C≡N键形成,表明C≡N键具有较好的高温热稳定性.
关键词:
BCN薄膜
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沉积温度
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退火
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脉冲激光沉积
