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阴极保护设计问题的优化模型

曹圣山 , 孙吉星

中国腐蚀与防护学报

讨论了腐蚀工程中阴极保护优化设计问题的数学模型和数值方法,针对阳极优化设计问题提出了一种新的偏微分方程反问题模型, 给出了相应的数值计算方法.得出了二维及三维I型、X型节点非线性极化阴极保护问题的数值计算结果.与实验测量结果对比显示,提出的反问题模型及相应的数值解法是合理、有效的.

关键词: 阴极保护 , Partial differential equation , Inverse problem , Potential distribution , Finite elem

Spatial Potential Distribution around Trench Target during Plasma Immersion Ion Implantation

Xiubo Tian , Chunbei Wei , Shiqin Yang , Paul K.Chu , Ricky K.Y.Fu

材料科学技术(英文)

Plasma ion implantation, an alternative to conventional beam-line ion implantation, is a sheath-acceleration ion bombardment technique and the initial sheath is crucial to the process efficacy and surface properties. The initial spatial potential distribution in the plasma sheath around a trench-shaped target is simulated using a two-dimensional model in this work. The results demonstrate that the sheath structure depends very much on the trench width. The potential drop in the trench may be quite small and the sheath expands outward if the width is small. This leads to a smaller incident ion dose into the sidewalls of the trench. In contrast, the initial potential distribution in the central region is quite similar to that without a trench if the trench width is larger than twice the ion-matrix sheath thickness for an infinite plane. Consequently, a higher ion dose into the sidewalls is possible.

关键词: Plasma ion implantation , null , null

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