Xinlian WANG
,
Jiarong LEI
,
Dezhi WANG
,
Ningkang HUANG
材料科学技术（英）
Sapphire crystals with different orientations may cone from implantation of Nb+ ions under different conditions and succedent annealing at reducing atmosphere. Optical analysis results show that the main optical absorption bands lay in the higher energy side of the spectra in the samples. The absorption curves were evaluated by Gaussian fitting based on the F-type centers, which were confirmed by luminescence measurements. The results of Gaussian fitting show that there were F center, F+ center, F2 center, F2+ center and F2+2 center in the Nb+ ions implanted sapphire. After annealing at different temperature, all types of color centers decreased, and the higher the annealing temperature, the more the defects decreased. Sub-micrometer particles were observed by the scanning electron microscopy.
关键词:
Ion implantation
,
null
,
null
周小东
原子核物理评论
doi:10.11804/NuclPhysRev.32.02.242
利用金属蒸发真空多弧离子源(MEVVA源)注入机将Ti+离子注入到高纯石英玻璃衬底中，离子注入的加速电压为20 kV，注入剂量为1.5×1017和3×1017 ions/cm2，将注入样品在氧气气氛下进行热退火处理，制备了TiO2纳米薄膜。采用光吸收谱、拉曼光谱、X射线光电子能谱、扫描电子显微镜和透射电子显微镜对注入样品进行了测试和表征，分析了TiO2薄膜的形成机理。在热退火过程中衬底中离子注入的Ti原子向外扩散到衬底表面被氧化形成了TiO2。TiO2的形成、晶粒尺寸和晶体结构依赖于热退火温度，而形成TiO2薄膜的厚度主要受离子注入剂量和热退火时间的影响。实验结果表明，该方法制备的TiO2纳米薄膜将有望应用于制备具有光催化、自清洁等特殊性能的自清洁玻璃。
关键词:
离子注入
,
热退火
,
TiO2
