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Structure, Optical Property and Thermal Stability of Copper Nitride Films Prepared by Reactive Radio Frequency Magnetron Sputtering

材料科学技术（英文）

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Structure, Optical Property and Thermal Stability of Copper Nitride Films Prepared by Reactive Radio Frequency Magnetron Sputtering

Jianrong Xiao

材料科学技术（英文）

Copper nitride (Cu₃N) films were prepared by reactive radio frequency magnetron sputtering at various nitrogen partial pressures, and the films were annealed at different temperatures. The crystal structure of the films was identified by X-ray diffraction technique. The Cu₃N fi...

关键词: Cu₃N films

Structure, Optical Property and Thermal Stability of Copper Nitride Films Prepared by Reactive Radio Frequency Magnetron Sputtering

Jianrong Xiao

材料科学技术（英文）

Copper nitride (Cu₃N) films were prepared by reactive radio frequency magnetron sputtering at various nitrogen partial pressures, and the films were annealed at different temperatures. The crystal structure of the films was identified by X-ray diffraction technique. The Cu₃N fi...

关键词: Cu₃N films

基底温度对直流磁控溅射制备氮化铜薄膜的影响研究

李兴鳌 , 杨建平 , 左安友 , 高雁军 , 袁作彬 , 任山令 , 李永涛

材料导报

采用反应直流磁控溅射镀膜法,在氮气分压为0.9Pa、不同基底温度下、玻璃基底上制备了纳米多晶Cu_3N薄膜,并研究了基底温度对薄膜结构和性能的影响.结果表明,当基底温度为100℃及以下时,薄膜以[111]方向择优生长为主;在150℃及200℃时,薄膜以[100]方向择优生长为主;250℃时开始出现C...

关键词: 氮化铜薄膜 , 直流磁控溅射 , 基底温度 , 热稳定性