Kaifeng DONG
金属学报(英文版)
doi:10.1016/S1006-7191(08)60066-6
The Fe/Pt multilayer films with different structures were deposited by RF magnetron sputtering on glass substrates, and the L10-FePt films were obtained after theas-deposited samples were subjected to vacuum annealing at various temperatures. Results show that the Fe/Pt multilayer structure can effectively reduce the ordering temperature of FePt film, and the in-plane coercivity of [Fe (5.2 nm)/Pt (5.2 nm)]7 multilayers can reach 161.2 kA/m after annealed at 350 ℃ for 30 min. When Fe and Pt layer thickness is equal, the coercivity of the film is the largest. On the other hand, the different Fe-Pt crystalline phases such as Fe3Pt and FePt3 phases are formed after annealing when the thickness ratio of Fe/Pt deviates from 1 after annealing. When Fe and Pt have the same thickness, the thinner single layer gets the lower ordering temperature and the larger coercivity.
关键词:
L10-FePt thin films
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Dan LI
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Yousong GU
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Xiangrong CHANG
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Fushen LI
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Lijie QIAO
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Zhongzhuo TIAN
材料科学技术（英文）
200 nm thick Fe-N magnetic thin films were deposited on glass substrates by RF sputtering. The as-deposited films have high saturation magnetization but their coercivity is also higher than what is needed Therefore it is very important to reduce coercivity. The samples were vacuum annealed at 250 °C under 12000 A/m magnetic field. When the N content was in the range of 5~7 at.pct, the thin films consisted of α'+α'' after heat treatment and had excellent soft magnetic properties of 4πM2=2.4 T, Hc<80 A/m. However, the thickness of a recording head was 2 μm, and Hc increased as thickness increased. In order to reduce the Hc, the sputtering power was raised from 200 W to 1000 W to reduce the grain size. 2 μm Fe-N thin films were vacuum annealed under the same condition, when the N content was in the range of 5.9~8.5 at.pct, the thin films kept its excellent magnetic properties of 4πM2=2.2 T, Hc<80 A/m. The properties of the films meet the need of a recording head material used in the dual-element GMR/inductive heads.
关键词:
Fe-N
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