谢二庆
,
王文武
,
姜宁
,
贺德衍
无机材料学报
利用离子注入的方法在Si（111）衬底上制备出了具有六方结构的稀土硅化物YSi2埋层,并对其进行了结构及电学特性的研究.钇注入剂量为1×1018Y+cm-2,注入能量为100keV.利用X射线衍射（XRD）及卢瑟福背散射技术（RBS）得到了注入样品的结构相.结果显示,在对衬底Si进行Y离子注入的过程中就已经形成了YSi2相,在随后的红外光辐照退火过程中,样品呈现出了取向生长的趋势.利用RBS的测量分析了注入层中的Y离子在样品不同深度处的浓度分布.利用四探针法对刚注入的样品进行了红外光辐照过程中的原位方块电阻测量,结果显示,当退火温度升到160℃时,样品中形成了斜方的YSi亚稳相;而240℃则对应着YSi-YSi2的相转变点。
关键词:
硅化钇
,
In-situ sheet resistance
,
ion implantation
张镭
,
王佩璇
,
陶蓉
,
马如璋
,
张国光
金属学报
本文利用透射电镜观察了HR-2及SS321不锈钢注入He~+并在T<1023K不同温度退火后的He泡结构,发现T=0.45T_m是一个转变点,当0.3T_m0.45T_m时,He泡主要通过迁移和合并而长大,长大激活能的实验值分别为0.41eV和0.31eV,实验结果表明,HR-2钢中He泡数密度在整个测量温区内均大于SS321钢,并且材料迅速肿胀的开始温度也高于SS321钢,说明HR-2钢比SS321钢具有较好的抗氦性能
关键词:
不锈钢
,
ion implantation
,
He bubble
J.H. Yang and T.H. Zhang(Nantong Institute of Technology
,
Nantong 226007
,
China)(Radiation Beam and Materials Engineering Lab
,
Beijing Normal University
,
Beijing 100875
,
China)
金属学报(英文版)
Ta and C ions extracted from a MEVVA ion source were implanted into Cr12 steel, with an implantation dose of (1-5)x1017cm-2, extraction acceleration 42kV, and average ion beam flux about 20-50μA·cm-2. Rutherford backscattering spectrum (RBS) was used to measure the surface composition after Ta and Ta+C implantation. Analysis of phase formed by Ta and C implantation was carried out by X-ray diffraction analysis (XRD). Experiment results showed that the wear rate of the implanted layer dropped 40% for Ta ion implantation and by a factor of 2.7 for Ta+C dual ion implantation. Ta+C dual ion implantation was found to reduce the friction coefficient of Cr12 steel. The wear mechanisms of the implanted layer were discussed.
关键词:
wear resistance
,
null
,
null
