邱万奇
,
潘建伟
,
刘仲武
,
余红雅
,
钟喜春
,
曾德长
无机材料学报
doi:10.3724/SP.J.1077.2012.00205
在铜基体上沉积铬-金刚石复合过渡层, 用热丝CVD系统在复合过渡层上沉积连续的金刚石涂层. 用扫描电镜(SEM)、X射线(XRD)、拉曼光谱及压痕试验对所沉积的镶嵌结构界面金刚石膜的相结构及膜/基结合性能进行了研究. 结果表明, 非晶态的电镀Cr在CVD过程中转变成Cr3C2, 由于金刚石颗粒与Cr3C2的相互咬合作用, 金刚石膜/基结合力高; 在294 N载荷压痕试验时, 压痕外围不产生大块涂层崩落和径向裂纹, 只形成环状裂纹.
关键词:
金刚石膜
,
inlay structure
,
composite plating
,
indentation
,
adhesive strength
A.WAGENDRISTEL
,
黄荣芳
,
H.BANGERT
,
杨霞
,
吴立航
,
王海峰
,
H.PANGRATZ
,
P.SKALICKY
金属学报
研究了Ti/TiN多层膜的显微结构,横截面试样的透射电镜研究和二次离子质谱深度分析均表明,该膜具有周期变化的多层结构,即:基体/FeTi/Ti/Ti_2N/TiN/Ti_2N/Ti/Ti_2N/TiN…Ti/Ti_2N/TiN.制备了压痕试样的断口试样,并用扫描电镜进行了观察.结果表明,多层硬膜在压痕试验时发生形变,出现压痕坑,在其周围形成材料堆积.随着所加载荷的增加,形变区扩大,越过膜/基界面进入基体,引起膜内的层间开裂和在膜/基界面上形成孔洞,研究结果表明,和单层TiN相比,Ti/TiN多层膜具有较好的韧性.
关键词:
Ti-N多层膜
,
microstructure
,
indentation
Y.Q. Wu
,
X. Y. Yang and Y.B. Xu (State Key Laboratory for Fatigue and Fracture of Materials
,
Institute of Metal Research
,
The Chinese Academy of Sciences
,
Shenyang 110015
,
China)(Laboratory of Atomic Imaging of Solids
,
Institute of Metal Research
,
The Chinese Academy of Sciences
,
Shenyang 110015
,
China)
金属学报(英文版)
A cross-sectional sample of indentation in [001] silicon was made and a lateral microcrack beneath the indentation was observed by high resolution electron microscope (HREM). The HREM images around the microcrack tip show an alternate distribution of the amorphous and lattice structure. The crack does not propagate by the successive debonding between certain atomic planes, meaning that before a crack completely opens, there may be a stage of amorphization, resulting from severe distortion of lattice.
关键词:
amorphization
,
null
,
null
,
null
,
null
