夏立芳
,
孙明仁
无机材料学报
用核反应分析方法,对等离子体基脉冲偏压沉积DLC膜的氢分布和氢含量进行了较系统的研究.结果表明,用等离子体基脉冲偏压沉积技术可获得较低氢含量的DLC膜;其氢含量范围约为6at％～17at％,且氢沿膜厚是均匀分布的,随等离子体密度及离化率降低,DLC膜的氢含量增加,荷能离子对生长表面的轰击具有较强的析氢作用,工作气体中引入氢气促进DLC膜中氢的析出.
关键词:
DLC膜
,
hydrogen distribution
,
hydrogen content
G. Ya
,
X.Y Zhang and Y. L. Du(State Key Laboratory for Corrosion and Protection
,
Institute of Corrosion and Protection of Metals
,
The Chinese Academy of Sciences
,
Shenyang 110015
,
China)(Applied Chemistry Division of Sciences Institute
,
Shenyang Polytechnic University
,
Shenyang 110023
,
China)
金属学报(英文版)
It was proposed how the concentration distribution was calculated in the treble lager wall of hgdrogenation reactor according to the principle of hydrogen diffusion at the steady state in this paper. Based on the steady hydrogen permeation current density i∞ measund with the hydrogen probe at a given temperature, the hydmpen concentrationson the key interfaces and hydrogen distribution at any given mdial profile in the single, double or treble layer wall of hydrogenation reactor could be found by applying the presented equations throoph suitable parmeters ioput. The theoretical bases were provided for developing the nondestructive probing technique of the concentration of atomic hydmpen in the wallS of hydrogenation reactors.
关键词:
hydrogen permeation
,
null
,
null
