Zhimin ZHOU
,
Yong ZHOU
,
Mingjun WANG
,
Chunsheng YANG
,
Ji'an CHEN
,
Wen DING
,
Xiaoyu GAO
,
Taihua ZHANG
材料科学技术（英文）
Microbridge testing was used to measure the Young's modulus and residual stress of metallic films. Samples of freestanding NiFe film microbridge were fabricated by microelectromechanical systems. Special ceramic shaft structure was designed to solve the problem of getting the load-deflection curve of NiFe film microbridge by the Nanoindenter XP system with normal Berkovich probe. Theoretical analysis of load-deflection curves of the microbridges was proposed to evaluate the Young's modulus and residual stress of the films simultaneously. The calculated results based on experimental measurements show that the average Young's modulus and residual stress for the electroplated NiFe films are 203.2 GPa and 333.0 MPa, respectively, while the Young's modulus measured by the Nano-hardness method is 209.6±11.8 GPa for the thick NiFe film with silicon substrate.
关键词:
Mechanical properties
,
金属薄膜
,
纳米压痕
Zhimin ZHOU
,
Lifang XIA
,
Mingren SUN
材料科学技术（英文）
Carbon nitride films have been synthesized in a wide range of biases from 0 to -900 V by vacuum cathodic arc method. The N content was about 12.0~22.0 at. pct. Upon increasing the biases from 0 to -100 V, the N content increased from 15.0 to 22.0 at. pct which could be attributed to the knot-on effect. While the further increasing biases led to the gradual falling of the N content to 12.0 at. pct at -900 V due to the enhancement of the sputtering effect. Below -200 V, with the increasing biases the sp2¬¬¬¬¬¬¬¬¬C fraction in the films decreased, as a result of which the I(D)/I(G) fell in the Raman spectra and the sp peaks also showed the decreasing tendency relative to the s peaks in the VBXPS (valence band X-ray photoelectron spectroscopy). While above -200 V, the sp2C fraction increased and the films became graphitinized gradually, accompanying which the I(D)/I(G) rose from -200 V to -300 V and the Raman spectra even showed the graphite characteristic above -300 V and the sp peaks rose again relative to the s peak. The carbon nitride films mainly consist of three types of bonding: CC, sp2CN and sp3CN bonds. In the first stage the sp3CN relative ratio rises and falls in the second stage, which corresponded well with the variation of the sp2C in the films. The subplantation mechanism resulting from the effect of ion energy played an important role in deciding the variation of the microstructure of the carbon nitride films.
关键词:
Carbon nitride
,
null
,
null
,
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