材料期刊网

SPUTTERING BEHAVIOUR OF IRON SILICIDES UNDER LOW ENERGY Ar~+ ION BOMBARDMENT

Z.X. Cao , E.G. Wang and YX. Ne(State Key Laboratory for Surface Physics , Institute of Physics , Beijing 100080 , China)

金属学报(英文版)

Surface compositions of Fe3Si, FeSi and FeSi2 under 0.1 to 5ke V Ar+ bombaniment have been investigated by using AES method, and the results indicate that the sudece compositions depend strongly on ion enerpy and sample bulk compositions. While in FeSi and FeSi2 only Fe enrichment in the selvage has been observed, in Fe3Si it is Si enriched when the ion enerpy is higher than 31OeV Competition between preferential sputtering and radiation enhanced segmpation is quoted to eoplain this phenomenon.

关键词: preferential sputtering , null , null