Ying Yang
材料科学技术（英文）
(Ti,Al)N films were fabricated by arc ion plating (AIP) and then annealed within a range of temperatures from 200 to 500°C for 30 min in vacuum. The results indicate that the average residual stresses decrease slightly from −5.84 to −4.98 GPa with increasing annealing temperature. The stre...
关键词:
Arc ion plating
