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FORMATION OF HEXAGONAL Co_(2—3)C IN Co BY CARBON ION IMPLANTATION

WANG Jian WU Xingfang CHEN Xunping CAI Jun University of Science and Technology Beijing , Beijing , China LIU Baixin Tsinghua University , Beijing , China FANG Zhengzhi Beijing Institute of Space Physics , Academia Sinica , Beijing , China

金属学报(英文版)

Co thin films were subjected to 50 keV carbon ion implantation.At the dose of 2.5× 10~(17)/cm~2,a hexagonal Co-carbide phase was observed for the first time.The lattice con- stants from electron diffraction are a=0.2685 nm and c=0.4335 nm.The phase does not dis- appear until the dose of 9×10~(17)/cm~2.Auger spectra showed that the stoichiometry was Co_(2-3)C.The behavior of the ferromagnetic carbides along the descending sequence of Ni-Fe-Co by Fermi energy of solids was interpreted.Furthermore,based on the kinetic con- dition of phase transformation and the band theory of solids,a possible explanation about the difference of the results of ion-metallurgy and thermal metallurgy was proposed.

关键词: ion implantation , null , null , null , null

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