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Nondestructive Evaluation of Ferroelectric Multilayer Capacitors Using Electromechanical Resonances

Hongtao SUN , Hongfang WANG , Liangying ZHANG and Xi YAO(Electronic Materials Research Laboratory , Xi'an Jiaotong University , Xi'an , 710049 , China)

材料科学技术(英文)

Under the mechanically free and clamped boundary conditions, electromechanical resonances of ceramic multilayer capacitors are calculated using vibration and piezoelectric equations. Multilayer capacitors made of ferroelectric BaTiO3 and Pb(Mg1/3Nb2/3)O3 ceramics have been used to examine the theoretical calculation. Frequency spectra of impedance and phase angle, capacitance and loss tangent of the capacitors under dc bias fields are carefully measured. A sudden change around the resonant frequency is observed in these spectra. A damped resonance indicates a defective capacitor while an undamped resonance is corresponding to defect free.Experimental results suggest that it is possible to use the spectra as a real time nondestructive evaluation method.

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