WAN Lijun Dalian Maritime University
,
Dalian
,
Liaoning
,
China CHEN Baoqing Dalian Institute of Technology
,
Dalian
,
Liaoning
,
China GUO Kexin(K.H.KUO) Institute of Metal Research
,
Academia Sinica
,
Shenyang
,
China Institute of Metal and Technology
,
Dalian Maritime University
,
Dalian
,
Liaoning
,
China
金属学报(英文版)
A new phase was found at the interface between Al film and Ni substrate when the time of ion-plating reaches 5 min.It was identified to be body centered tetragonal lattice with the constants a=b=0.588 nm,c=0.480 nm.The variation of microstructure and phases with the ion-plating time were observed.Based on these results,the ion-plating film formation mech- anism has been also discussed.
关键词:
magnetron sputtering
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null
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null
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null
