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TRIBOLOGICAL AND HIGH SPEED TURNING PERFORMANCE IN Ti1-xAlxN COATINGS PREPARED BY CLOSE-FIELD UNBALANCED MAGNETRON SPUTTERING

P.W.Shum , M.Escursell , T.H.Wong , K.Y.Li , Z.F.Zhou , Y.G.Shen

金属学报(英文版)

Titanium-aluminium-nitride (Ti1-xAlxN) coatings were deposited by close-field unbalanced magnetron sputtering on M42 steel substrates and WC-6wto inserts at 450℃. The tribological behavior was analyzed by sliding against steel and WC-6wt0o balls, while the turning performance was evaluated by a conventional turning machine at high cutting speeds without using coolants. In the tribological tests, the formation of transfer layer and the variations of hardness of the coatings played an important role for sliding against steel balls. For the coatings sliding against WC-6wto balls, the Ti-Al-N coatings showed a similar friction coefficient, but the TiN coating exhibited a lower value. The difference could be explained by the tri-oxidation wear mechanism. In the turning tests, a superior cutting performance of the coating was found at x=0.45, which endured 38 minutes before the tool flank wear reached the maximum value of 0.3mm, whereas only 20 minutes were endured for the TiN coating. The excellent performance of the coatings in the turning tests could be explained by the enhanced mechanical properties and oxidation/diffusion resistance of the coatings.

关键词: hardness , null , null , null

CARBON NITRIDE FILMS PREPARED AT DIFFERENT N2/Ar RATIOS BY CLOSED FIELD UNBALANCED REACTIVE MAGNETRON SPUTTERING

A.Vyas , K.Y.Li , Z.F.Zhou , Y.G.Shen

金属学报(英文版)

Carbon nitride ( CNx thin films have been deposited onto Si(100) (for structural and mechanical analyses) and M42 high-speed-steel (for tribological measurements) substrates at room temperature by closed-field unbalanced magnetron sputtering. The mechanical and tribological properties of these films were highly dependent on the N/C concentration ratio that was adjusted by the F(N2)/F(Ar) flow-rate ratio at fixed substrate biasing of -60V during deposition. The films were characterized by employing scanning electron microscopy (SEM), atomic force microscopy (AFM), nano-indentation measurements, X-ray photoelectron spectroscopy (XPS), Raman scattering and Fourier transform infrared (FTIR) spectroscopy, pin-on-disc tribometer, scratch tester, and Rockwell-C tester. The results showed that the N content in the films increased with the N2 pressure. However, the maximum N/C ratio obtained was 0.25. The nanohardness was measured to be in the range of 11.7-20.8 GPa depending on the N/C ratios. The XPS N 1s spectra showed the existence of both N-C sp^2 and N-C sp^3 bonds in films. Raman and FTIR spectra exhibited that N-C bonds were fewer when compared to other N-C bonds. The friction coefficient of the film deposited onto steel substrate with N/C=0.26 was measured to be -0.08 and for film with N/C=0.22 a high critical load of 70N was obtained. The tribological data also showed that the wear rates of these films were in the range of -10^-16m^3/Nm, indicating excellent wear resistance for CNx films.

关键词: carbon nitride , null , null

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