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COMPARISON OF SURFACE PROPERTIES OF Ti-6Al-4V COATED WITH TITANIUM NITRIDE, TiN+TiC+Ti(C,N)/DLC, TiN/DLC AND TiC/DLC FILMS BY PLASMA-BASED ION IMPLANTATION

H.B. Ji , L.F. Xia , X.X. Ma , Y. Sun and M.R. Sun School of Materials Science and Engineering , Harbin Institute of Technology , Harbin 150001 , China

金属学报(英文版)

The surface properties Of Ti-6Al-4V alloy coated with titanium nitride, TIN + TiC + Ti(C,N)/DLC, TIN/DLC, and TI C/DLC films by plasma-based ion implantation (PBII) with nitrogen, PBH with nitrogen then acetylene, PBII with nitrogen then glow discharge deposition with acetylene plus hydrogen, and PBH with acetylene then glow discharge deposition with acetylene plus hydrogen, respectively, are compared (DLC: diamond like carbon). The corresponding films are found getting dimmer: light gold or gold, smoky color (uneven), light red in black (uneven), and graphite black. and the corresponding film resistivities are about: (1. 0--3. 3) x 10~7, (0. 05- 2. 00) x 10~11 ) (0.016-2.400)× 10~11, and (0.45-1.01)x 10~11 Ω/cm, respectively. Antioxidation ability of the titanium nitride film is poor while existence of carbon (or carbide) improves the antioxidation ability of the films. Having underpone excellent intermediate transitional region of nitrogen and carbon implantation, the top DLC layer of the TIN+TIC+Ti(C,N)/DLC multilayer formed after the carbon implantation has the best adhesion with the substrate among all the multilayers presented. Although microhardness of the samples increases in the order of coatings of titanium nitride, TIN/DLC, TiN+TiC+Ti(C,N)/DLC, and TiC/DLC, the TIN/DLC and TiC/DLC multilayers have greater brittleness compared with other films presented.

关键词: Ti-6Al-4V , null , null , null , null

XPS INVESTIGATION OF NITROGEN IONS IMPLANTED INTO ALUMINUM ALLOY BY PLASMA BASED ION IMPLANTATION

Z.J. Zhan , X.X. Ma , Y. Sun and L.F. Xia School of Materials Science and Engineering , Harbin Institute of Technology , Harbin 150001 , China

金属学报(英文版)

Aluminum alloy 2024 has been implanted with nitrogen ions at various doses by plasma based ion implantation (PBII). The introduction of energetic ions caused structural change within the near surface region of the solid. The samples have been characterized by X ray Photoelectron Spectroscopy at various depths. The chemical states of Al and N were identified by deconvolution of the recorded XPS spectra. After plasma based ion implanted nitrogen into aluminum, not only the AlN precipitates but also supersaturated solution of nitrogen formed. The presence of aluminum in different chemical states corresponding to Al, AlN and Al 2O 3. The majority of nitrogen participates in the form of the supersaturated solution. With the increase of nitrogen dose, the amount of AlN precipitates increased.

关键词: plasma based ion implantation , null , null , null

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