C. Shen
,
H. T. Zhang
,
M. Lu
,
X.M. Bai and Q.J. Zhang(1) Department of Materials Science
,
Fudan University
,
Shanghai 200433
,
China2) Department of Materials Science and Engineering
,
The Ohio State University
,
OH 43210
,
USA )Manuscript received
金属学报(英文版)
Temperature - dependent Embedded-Atom-Method (EAM) function of hcp titanium have been determined by fitting to the lattice constants and elastic constants measured at various temperatures as well as by considering the universal Rose's relation.The EAM functions thus obtained satisfy the stable structure requirement and Cauchy discrepancy. This work shows that EAM functions do have temperature-dependence,and in the meanwhile it also provides EAM functions of titanium for the study of Ti-based metallic materials at various temperatures.
关键词:
embedded- atom-method (EAM)
,
null
,
null
HE Youduo
,
Baotou Institute of Iron and Steel Technology
,
Baotou
,
ChinaY.SAHAI
,
The Ohio State University
,
USA
金属学报(英文版)
A mathematical model to represent the fluid flow, temperature distribution and mass transfer in CVD reactors has been developed. The model is used to predict the velocity, temperature, and molar concentration profiles in the tapered annulus of a reactor for silicon deposition from SiCl_4 in H_2. Results of the investigation contribute to the understanding of the transport pro- cesses involved in such a system. The model can also be used for optimizing the design parameters, such as inlet flow rate, susceptor tilt angle, etc.
关键词:
reactor of chemical vapor deposition
,
null
,
null
,
null
