W.J. Li
,
Z.M. Wu
,
J.F. Zhao
,
Z.H. Wu
,
X.L.Zhao and B.C. Cai ( Information Storage Research Center
,
Shanghai Jiaotong University
,
Shanghai 200030
,
China
,
College of Chemical Engineering & Technology
,
Taiyuan University of Technology
,
Taiyuan 030024
,
China)
金属学报(英文版)
Titanium dioxide thin films were prepared by low pressure metal organic chemical vapor deposition (LP-MOCVD) from titanium IV isopropoxide. Nitrogen was used as a carrier gas for the titanium precursor,and oxygen as a reactant gas. The deposition rates of the films have been studied as functions of process parameters such as sabstrate temperature and oxygen flow rote. Structural evolution of the films has been studied as functions of substrate temperature (110 to 700℃) and annealing temperature. The films have been characterized by X-ray dissection and by Raman scattering. Films deposited onto Si(100) substrates were amorphous at 110-250℃, anatase at 350- 550℃ and rutile above 650℃. The films deposited at substrate temperatures less than 550℃ and annealed at 600℃ for two hours were annealed, annealed at 700℃ for two hours were mixtures of anatase and rutile, and annealed at 850℃ for two hours were rutile.
关键词:
MOCVD
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null
,
null
,
null
,
null
Z.H.Li
,
X.P.Liu
,
Y.Gao and Z.Xu Research Institute of Surface Engineering
,
Taiyuan University of Technology
,
Taiyuan 030024
,
China
金属学报(英文版)
It, ageing high speed steel (AHSS) with high cobalt, has a strong ability of age hardening. However, it has two disadvantages, One is short of toughness, the other is its high price because of its too much alloy content especially cobalt. All of these effect on its widespread using. Now there is a new method without the two flows to form this steel in the surface of ingot iron by use of double glow plasma surface alloying technique.In this paper, the following three parts are introduced: the metallurgical process of this surface ageing high speed steel (SAHSS), the micro structure of the alloying layer, the alloy distribution in the layer. By using the designed source pole, the special alloying process, the required surface alloying content, just like the AHSS—Co23W11Mo7 can be achieved in the surface layer. This new method has wide prospect in the fields of tools, moulds and other wear resisting fields.
关键词:
SAHSS
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null
,
null
