L.Chen
,
Z.Y.Liu
,
D.C.Zeng
,
W.Q.Qiu
,
Z.H.Yuan
,
S.S.Lin
,
H.J.Hou
金属学报(英文版)
DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition (VCAD). The composition, microstructure and micro-hardness of the films have been studied in this paper. The results indicate that hardness of the DLC films is different on the different substrates. Hardness of the films increases with decreasing in surface roughness of the films. The maximum value of micro-hardness belongs to the DLC films deposited under the hydrogen pressure of 0.35Pa and the neqative bias of 100V.
关键词:
DLC films
,
null
,
null
X.W.Shi
,
Z.Y.Liu
,
D.C.Zeng
,
C.M.Li
金属学报(英文版)
Ni-Cr and Fe-Cr-Al films deposited on the Al2O3 substrate are studied by a method of vacuum evaporation in this paper. Influence of resistance value on density and evap-oration parameters of the films reveals that the resistance of films and the adhesion of films to substrates are determined by the evaporation time and the substrate temperate under the condition of the maximum vacuity of 6.2×10^-4Pa, resvectively.
关键词:
vacuum evaporation
,
null
,
null
