MJ.Kim
,
Y.B.Kim
,
C.B.Song
,
Y.Li
,
D.S.Suhr
,
C.O.Kim
,
T.K.Kim
材料科学技术（英文）
The magnetic properties and microstructure of diffusion annealed [Ta/Nd/NdFeB/Nd/Ta] thin films have been investigated. The films were deposited on Si substrate with various thickness ratio of Nd/NdFeB layer (R=0 similar to 3.3), then diffused and crystallized by annealing at 650 degrees C for 10 min. The film without Nd layer showed soft magnetic behavior and high content of alpha-Fe phase. The films with R greater than or equal to 1 showed good hard magnetic properties with the high coercivity of about 20 kOe.
关键词:
T.S.Yoont
,
W.S.Cio
,
C.O.Kim
,
H.W.Kang
,
Y.H.Kim
材料科学技术（英文）
To obtain microstructure of magnetic devices, the thin film inductors were fabricated by the process such as thin film manufacturing, photolithography and wet etching. The frequency characteristics of these devices are measured at high frequency range. When the inductor sizes of the spiral and the meander type are same, the inductance and the quality factor of the spiral type inductor are larger than those of the meander type inductor, but the driving frequency of the spiral type inductor is fewer than that of the meander type inductor.
关键词:
W.S.Cho
,
T.S.Yoon
,
C.O.Kim
,
H.B.Lee
材料科学技术（英文）
The transverse permeability ratio (TPR) and longitudinal permeability ratio (LPR) as a function of an external field of mumetal films have been investigated in conjunction with the magnetic properties. The mumetal films were prepared by the R.F.magnetron sputtering method in Ar atmosphere. The LPR curve shows the single peak pattern, and the TPR curve shows the double peak pattern indicating the existence of the magnetic anisotropy effect. The magnitude of the incremental permeability are strongly depended on the magnetic softness. The large changes of LPR and TPR in low external fields can be useful for the evaluation of the magnetic softness.
关键词:
