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Characterization of Mechanical Properties of Silicon Nitride Thin Films for MEMS Devices by Nanoindentation

H.Huang , X.Z.Hu , Y.Liu , M.Bush , K.Winchester , C.Musca , J.Dell , L.Faraone

材料科学技术(英文)

An experimental investigation of mechanical properties of thin films using nanoindentation was reported. Silicon nitride thin films with different thicknesses were deposited using plasma enhanced chemical vapor deposition (PECVD) on Si substrate. Nanoindentation was used to measure their elastic modulus and hardness. The results indicated that for a film/substrate bilayer system, the measured mechanical properties are significantly affected by the substrate properties. Empirical formulas were proposed for deconvoluting the film properties from the measured bilayer properties.

关键词: Mechanical property , null , null , null

EFFECT OF OXYGEN CONTENTS ON OXYGEN POTENTIALS OF H_2O-H_2 AND H_2O-H_2-INERTS GAS MIXTURES

FANG Zheng CHEN Xinmin(H.M.Chen) Central South University of Technology , Changsha , China FANG Zheng , Associate Professor , Department of Chemistry , Central South University of Technology , Changsha , China

金属学报(英文版)

By taking the effect of oxygen contents into account,a new set of formulae which represents the oxygen potentials of H_2O-H_2 and H_2O-H_2-inerts gas mixtures has been derived.Classi- cal representation is only a particular case of it.Some of the variables affecting equilibrium atmosphere when trace oxygen is present and optimum preparation of the gas mixtures to min- imize errors have been discussed.The reliability of some of previous equilibrium experiments under the oxygen potentials controlled by H_2O-H_2 or H_2O-H_2-inerts gas mixtures has also been criticized.

关键词: gas equilibration method , null , null , null

Ferromagnetism and superparamagnetism of ZnCoO : H nanocrystals

Applied Physics Letters

ZnCoO:H nanocrystals are weak ferromagnetic at room temperature with a small coercivity and a small remanence, whereas ZnCoO nanocrystals are paramagnetic. The thermal irreversibility of zero-field cooling and field cooling magnetizations of ZnCoO:H nanocrystals corresponds to the existence of superparamagnetism due to the nanosize effect. X-ray photoelectron spectra show the incorporation of Co(2+) ions inside the ZnO lattice without changing the wurtzite structure. Our data suggest that hydrogen can induce ferromagnetism in ZnCoO and that ferromagnetic ZnCoO:H crystals with small particle size can show the superparamagnetism. (C) 2008 American Institute of Physics.

关键词: magnetic semiconductors;zno;hydrogen;cobalt

H+4, H+5和H+7团簇离子的测量和确认

杨百方 , 缪竞威 , 杨朝文 , 师勉恭

原子核物理评论 doi:10.3969/j.issn.1007-4627.2002.z1.038

报告了H+4, H+5, H+7等团簇离子的测量结果. 确认可以由H+3与一个或多个HH2相互作用形成较大的H+4, H+5, H+7等团簇离子.

关键词: H+4团簇离子 , H+5团簇离子 , H+7团簇离子

H型钢裂纹成因分析

王硕明 , 丁志军 , 于恒 , 张彩军

钢铁钒钛

研究了某H型钢厂采用半敞开方式浇注的H型钢腹板裂纹产生的原因.在该厂选取了26块有代表性裂纹的试样进行了细致的研究,研究认为:H型钢腹板裂纹主要是由钢中夹杂物因素造成,通过对钢中T[O]的研究发现,中间包T[O]量平均为94×10-6,铸坯中T[O]平均为60.8×10-6,同时对比1流铸坯和2流铸坯的T[O]量变化可以发现,中间包流场分布不合理.对该厂现有的中间包进行FLUENT模拟后发现,中间包稳流器矮坝较低,不能完全消除短路流,尤其在浇注后期,矮坝损耗殆尽,基本不起作用,短路流严重,应加以优化.

关键词: H型钢 , 裂纹 , 夹杂物 , 数学模拟

国内热轧H型钢工艺特点

徐峰 , 何彩红 , 徐勇

钢铁研究

简述了国内H型钢的发展现状,通过列举国内典型H型钢生产线,介绍分析了轧制H型钢的1-3-1、1-3和连轧三种工艺布置,以及目前轧制H型钢的X-X和X-H两种方法.根据目前国内生产状况,提出了H型钢技术改进的几项措施.

关键词: H型钢 , 生产工艺 , 万能轧机

INVESTIGATION ON DEPOSITIONS AND HARDNESS CHARACTERISTICS OF a SiC:H FILMS

X.F.Rong and Z.Y.Qin College of Mechanical Engineering , Taiyuan University of Technology , Taiyuan 030024 , China

金属学报(英文版)

In this paper, a deposition feature of a SiC:H films deposited by a RF sputtering system and a effect on the hardness of the films with various deposition conditions are investigated, and the effects of the silicon on a C:H are studied. It follows from the results that the properties of hardness can be changed with the depositing conditions. An increase of silane in the gas phase allows to deposit a SiC:H having tetrahedral structure. The sets of deposition conditions by which the different types of a SiC:H films can be deposited are obtained.

关键词: a SiC:H film , null , null

氧对H_2O-H_2及H_2O-H_2惰气混合气体氧位的影响

方正 , 陈新民

金属学报

考虑到氧的影响,本文导出一组H_2O-H_2及H_2O-H_2-惰气混合气体氧位新的表征式。经典表征式是该公式的特例。本文讨论了微量氧存在时对平衡气氛影响的各种因素以及减小误差的最佳配气条件,同时评价了某些用H_2O-H_2(或H_2O-H_2-惰气)混合气体控制氧位的平衡实验的可靠程度。

关键词: 气体平衡法 , H_2O-H_2 , H_2O-H_2-inerts , oxygen potential

莱钢H型钢的开发研制

刘英瑞

钢铁

简述了热轧H型钢的用途,热轧H型钢与其他型钢(工字钢)在生产工艺上的不同要求,介绍了莱钢热轧H型钢(中型)生产线的工艺流程、主要设备、关键技术,以及中型型钢产品大纲中的20个规格的热轧H型钢的开发研制工艺技术要点、存在的问题和采取的措施.

关键词: 万能轧机 , H型钢 , 研制开发

热轧H型钢的在线控冷

贾玉萍 , 吴迪 , 郭娟 , 赵宪明 , 王培文

钢铁

针对H型钢轧制中的一些问题,设计了H型钢在线控冷装置.此装置采用气雾冷却方式,着重对H型钢R部进行快速冷却,冷速达100℃/s以上.试验结果表明,产品表面状态改善,晶粒细化,屈服强度和抗拉强度均提高21 MPa以上且断面性能均匀.轧件上冷床温度降低,生产效率提高,年产量达到预定产能的2倍以上且节省原冷床上风机的消耗.

关键词: H型钢 , 型钢轧制 , 气雾冷却 , 控制冷却

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