Xiaoying CHENG
,
Xiaojing WAN
,
Yexin CHEN
,
Meiyi YAO
材料科学技术（英文）
Some observation relating tp the solubility, diffusivity and intergranular cracking by hydrogen transport from the external surface in Co3Ti, Co3Ti-Al and Co3Ti-Fe alloys have been carried out. The results show that the addition of alloying elements Al or Fe to Co3Ti alloy can increase the critical hydrogen concentration for changing from transgranular to brittle intergranular fracture, therefore suppress the moisture induced environmental embrittlement.
关键词:
Applied Physics a-Materials Science & Processing
Amorphous aluminate YAlO3 (YAO) thin films on n-type silicon wafers as gate dielectric layers of metal - oxide semiconductor devices are prepared by pulsed laser deposition. As a comparison, amorphous aluminate LaAlO3 (LAO) thin films are also prepared. The structural and electrical characterization shows that the as-prepared YAO films remain amorphous until 900 degrees C and the dielectric constant is similar to 14. The measured leakage current of less than 10(-3) A/cm(2) at a bias of V-G = 1.0 V for similar to 40-nm-thick YAO and LAO films obeys the Fowler Nordheim tunneling mechanism. It is revealed that the electrical property can be significantly affected by the oxygen pressure during deposition and post rapid thermal annealing, which may change the fixed negative charge density at the gate interface.
关键词:
hafnium oxide;si;stability;silicon;transition;dioxide;devices;hfo2
