{"currentpage":1,"firstResult":0,"maxresult":10,"pagecode":5,"pageindex":{"endPagecode":5,"startPagecode":1},"records":[{"abstractinfo":"通过建立300 mm硅片双面化学机械抛光中硅片上定点相对于上下抛光垫的运动轨迹方程, 分析了内外齿轮转速、抛光布转速对运动轨迹分布的影响, 调整三者大小使得运动轨迹分布较均匀. 实验证明运动轨迹路径长度与抛光去除厚度成正比关系, 计算运动轨迹路径长度确定抛光垫的转速以达到上下表面具有相同的抛光速率. 研究结果为300 mm硅片双面化学机械抛光找出优化工艺参数、提高硅片抛光后表面质量提供了理论依据.","authors":[{"authorName":"黄军辉","id":"4e201e9a-8850-477c-bf98-690901fd99e0","originalAuthorName":"黄军辉"},{"authorName":"周旗钢","id":"ee6baf5f-b98b-46b3-949c-73537ae129bd","originalAuthorName":"周旗钢"},{"authorName":"万关良","id":"5f3f901a-97c1-4ffa-b194-8733c3ffebd4","originalAuthorName":"万关良"},{"authorName":"肖清华","id":"56014acd-4c97-46a8-b5ad-0fd66502f179","originalAuthorName":"肖清华"},{"authorName":"库黎明","id":"5996dbb5-f99d-4cde-b8e4-e54a1dd80710","originalAuthorName":"库黎明"}],"doi":"10.3969/j.issn.0258-7076.2007.06.003","fpage":"737","id":"66b4962e-8de0-4436-b4d4-1d1bde3a83b5","issue":"6","journal":{"abbrevTitle":"XYJS","coverImgSrc":"journal/img/cover/XYJS.jpg","id":"67","issnPpub":"0258-7076","publisherId":"XYJS","title":"稀有金属"},"keywords":[{"id":"600207c4-a55d-460b-955b-31e413ae8768","keyword":"双面化学机械抛光","originalKeyword":"双面化学机械抛光"},{"id":"aff0cb0e-61c8-4e9f-80e7-53784a6416d4","keyword":"轨迹模拟","originalKeyword":"轨迹模拟"},{"id":"995f2b1b-a327-4f11-ae81-dab680564a2a","keyword":"非均匀性","originalKeyword":"非均匀性"},{"id":"6fbf7768-219e-4522-a1a0-701fab07d442","keyword":"DSP","originalKeyword":"DSP"}],"language":"zh","publisherId":"xyjs200706003","title":"300 mm硅片双面抛光运动轨迹模拟和优化","volume":"31","year":"2007"},{"abstractinfo":"利用非接触式光学轮廓仪研究了双面抛光过程中不同压力下300mm硅片表面形貌的变化,并通过Stribeck曲线进行了探讨.结果表明,双面抛光过程中机械作用的强度随着压力的变化而不同,从而影响抛光后的硅片表面形貌.当硅片表面与抛光垫之间的接触处于固-液混合接触区时,协调机械去除作用与化学腐蚀作用之间的关系,使之达到平衡,可以显著地降低硅片表面的微粗糙度和峰谷值.","authors":[{"authorName":"库黎明","id":"585365de-f8fb-4b83-9f68-82e5bb223ca4","originalAuthorName":"库黎明"},{"authorName":"李耀东","id":"f41436ae-288f-4ff8-817b-a034bb845d3a","originalAuthorName":"李耀东"},{"authorName":"周旗钢","id":"f2c4a669-15eb-4bc3-8232-eb8bd707f490","originalAuthorName":"周旗钢"},{"authorName":"王敬","id":"2e0f57e0-96cc-4635-9e2f-9f8a67159143","originalAuthorName":"王敬"}],"doi":"10.3969/j.issn.0258-7076.2006.02.002","fpage":"134","id":"8c2c4ace-8187-4747-9308-5f90a40ea325","issue":"2","journal":{"abbrevTitle":"XYJS","coverImgSrc":"journal/img/cover/XYJS.jpg","id":"67","issnPpub":"0258-7076","publisherId":"XYJS","title":"稀有金属"},"keywords":[{"id":"a81afedf-30a9-420d-9ee0-417adb5c6299","keyword":"硅片","originalKeyword":"硅片"},{"id":"4091b3a2-a69f-4192-9265-3e1859c0fb70","keyword":"双面抛光","originalKeyword":"双面抛光"},{"id":"f237ddac-3e2f-4c6c-98f5-6726b6555265","keyword":"非接触式光学轮廓仪","originalKeyword":"非接触式光学轮廓仪"},{"id":"3b45dd81-5169-474c-8c42-db030afcb0fd","keyword":"表面形貌","originalKeyword":"表面形貌"}],"language":"zh","publisherId":"xyjs200602002","title":"双面抛光工艺中压力对300 mm硅片表面形貌的影响","volume":"30","year":"2006"},{"abstractinfo":"文中主要针对国内矿山企业尾矿库的现状,分析了小型尾矿库在技术、管理、环境保护等方面存在的问题和安全隐患,论述了大中型尾矿库建设的优越性和技术的可行性.通过对比分析,提出了限制小型尾矿库的审批建设,研究建设大中型尾矿库的新型管理模式.","authors":[{"authorName":"李明","id":"92366df0-c8e6-4cf6-9997-2e2f94b7b588","originalAuthorName":"李明"},{"authorName":"郑怀昌","id":"d50eb488-1425-470f-badc-9b0a1868bac5","originalAuthorName":"郑怀昌"}],"doi":"10.3969/j.issn.1001-1277.2007.10.013","fpage":"46","id":"d14e4cb4-33c7-49e8-b78d-5914241d703c","issue":"10","journal":{"abbrevTitle":"HJ","coverImgSrc":"journal/img/cover/HJ.jpg","id":"44","issnPpub":"1001-1277","publisherId":"HJ","title":"黄金"},"keywords":[{"id":"14ca580f-7ed4-4cdd-bbff-fd47ced1c903","keyword":"小型尾矿库","originalKeyword":"小型尾矿库"},{"id":"db06fe7a-de49-41cc-8f64-458c9096ff9c","keyword":"大中型尾矿库","originalKeyword":"大中型尾矿库"},{"id":"2342a789-b483-4aeb-aa68-56c2b07313dd","keyword":"环境保护","originalKeyword":"环境保护"},{"id":"945087a4-25e3-42e2-b5e2-617b1c429a52","keyword":"可持续发展","originalKeyword":"可持续发展"}],"language":"zh","publisherId":"huangj200710013","title":"尾矿库管理模式探讨","volume":"28","year":"2007"},{"abstractinfo":"介绍了云南省黑色冶金产品质量监督检验站质检网络数据库系统运用程序的开发策划、数据库设计、类的设计创建、代码的编写、测试等内容,并对运用程序主要功能进行了说明,供数据库开发人员借鉴和使用人员参考.","authors":[{"authorName":"高志方","id":"fa1a4013-4f73-4bba-86f7-2c18e62b075f","originalAuthorName":"高志方"}],"doi":"10.3969/j.issn.1001-0777.2001.05.013","fpage":"41","id":"5092652a-c769-4e30-9729-0fe36c336fc7","issue":"5","journal":{"abbrevTitle":"WLCS","coverImgSrc":"journal/img/cover/WLCS.jpg","id":"64","issnPpub":"1001-0777","publisherId":"WLCS","title":"物理测试"},"keywords":[{"id":"21678ea1-0d6a-4e82-8932-d9316d7ee2b2","keyword":"数据库","originalKeyword":"数据库"},{"id":"b7c9e3d7-c2ae-40bf-b906-5c6237ca6d29","keyword":"表","originalKeyword":"表"},{"id":"8db19858-c84b-44a6-bbb6-9f0b7f92fa00","keyword":"运用程序","originalKeyword":"运用程序"}],"language":"zh","publisherId":"wlcs200105013","title":"质检网络数据库系统","volume":"","year":"2001"},{"abstractinfo":"介绍了当今世界上五大评价中子数据库, 即美国的ENDF/B-6、日本的JENDL-3.2、欧洲的JEF-2.2、中国的CENDL-2.1及俄罗斯的BROND-2, 的现况, 以及国际评价中子数据库的发展趋势和用户如何获得与使用这些数据. 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