采用溶胶凝胶工艺,在ITO透明导电玻璃基板上成功地制备了Zn掺杂的Pb0.4Sr0.6TiO3(PST)铁电薄膜.利用XRD测定了薄膜的相结构,精密阻抗分析仪研究了薄膜的介电性能.在不同外加直流电场下测试Zn掺杂PST薄膜的介电性能,研究薄膜的介电可调性大小与外加偏压施加顺序的关系.结果表明,该薄膜呈现单一的钙钛矿相结构.发现了在预先施加一个相对较高的预极化电场,薄膜在零电场下的介电常数得到了提高.预极化能更多地激发出介电薄膜中偶极子数目,增大了薄膜在零偏压处的介电常数,从而提高了薄膜的介电可调性,在不同的测试电压下可分别从提高3%到提高45%不等,测试电压越低,表现出来的这种提高就越大.
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