用反应磁控溅射方法在高速钢基体上制备了CNx薄膜材料,用高分辨透射电镜(HRTEM)研究CNx薄膜的微观结构,用X射线光电子能谱仪(XRD)研究薄膜的元素组成和化学键类型,用显微硬度计检测薄膜的硬度,用划痕仪检测薄膜的结合力,通过改变对磨过程中的载荷和对磨速率用销盘式摩擦磨损试验仪着重研究了载荷和对磨速率对CNx薄膜的摩擦学性能的影响.结果表明:CNx薄膜为非晶结构,由sp2 C-C,sp2 C-N和sp3 C-N化学键组成,TiN过渡层的加入使CNx薄膜的结合力明显提高,CNx薄膜的摩擦系数和磨损率随着载荷和对磨速率的增加呈降低趋势,薄膜在不同对磨条件下均呈现较好的摩擦学性能.
参考文献
| [1] | Cohen ML .Caleulation of bulk of diamond and zinc-blende solids[J].Physical Review B:Condensed Matter,1985,32:7988-7991. |
| [2] | Liu AY;Cohen ML .Prediction of new low compressibility solids[J].SCIENCE,1989,245:841-842. |
| [3] | Liu AY;Cohen ML;Has KC et al.Structural properties of a three dimensional all-sp2 phase of carbon[J].Physical Review B:Condensed Matter,1991,43:6742-6745. |
| [4] | Cohen ML .Structural,electronic and optical properties of carbon nitride[J].MATERIALS SCIENCE & ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING,1996,209:1-4. |
| [5] | Um RK;Cohen ML;Martinez G .Allalytic relation between bulk moduli and lattice constants[J].Physical Review B:Condensed Matter,1987,35(17):9190-9194. |
| [6] | Corkill LJ;Cohen ML .Calculated quasiparticle bandgap of betaC3N4[J].Physical Review B:Condensed Matter,1993,48:17622-17624. |
| [7] | Teter DM;Hemley RJ .Low-compressibility carbon nitrides[J].SCIENCE,1996,271:53-55. |
| [8] | 陈刚,阎兴斌,刘惠文,徐洮.电化学制备CNx薄膜及其结构表征[J].材料科学与工程学报,2004(05):732-734. |
| [9] | ZHANG Hua-yu,张化宇,刘良学,马洪涛,刘凡新,刘会良,王东.不同工艺制备的ta-C和ta-C：N薄膜表面粗糙度研究[J].材料科学与工程学报,2006(05):673-675. |
| [10] | 吴大维,吴越侠,彭友贵,范湘军.高速钢刀具镀氮化碳超硬涂层研究[J].中国机械工程,2002(24):2154-2157. |
| [11] | 阎兴斌,徐洮,王博,杨生荣.电化学沉积DLC膜及其表征[J].材料科学与工程学报,2003(05):656-659. |
| [12] | 王恩哥;陈岩;郭丽萍 等.C3N4的制备与结构分析—Ⅱ.Ni衬底上的样品[J].中国科学(A辑),1997,27(02):154-157. |
| [13] | 江锦春,程文娟,张阳,朱鹤孙,沈德忠.微波等离子体化学气相沉积制备碳氮晶体薄膜[J].人工晶体学报,2004(06):930-934,939. |
| [14] | Zheng WT.;Hellgren N.;Xing KZ.;Ivanov I.;Sjostrom H. Hultman L.;Sundgren JE.;Broitman E. .REACTIVE MAGNETRON SPUTTERING OF CNX THIN FILMS AT DIFFERENT SUBSTRATE BIAS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(0):223-227. |
| [15] | J. Neidhardt;L. Hultman;E. Broitman .Structural, mechanical and tribological behavior of fullerene-like and amorphous carbon nitride coatings[J].Diamond and Related Materials,2004(10):1882-1888. |
| [16] | H. Riascos;J. Neidhardt;G.Z. Radnoczi;J. Emmerlich;G. Zambrano;L. Hultman;P. Prieto .Structure and properties of pulsed-laser deposited carbon nitride thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(1/2):1-6. |
| [17] | 吴大维;何孟兵;熊子友 等.新型超硬材料—氮化碳薄膜研究新进展[J].材料导报,2002,24(13):2154-2156. |
| [18] | Kato K;Umehara N;Adachi K .Friction,wear and N2 lubrication of carbon nitride coatings:a review[J].WEAR,2003,254:1062-1069. |
| [19] | Broitman E.;Sjostrom H.;Ivanov I.;Greene JE.;Sundgren JE.;Zheng WT. .Stress development during deposition of CNx thin films[J].Applied physics letters,1998(20):2532-2534. |
| [20] | D.G. Liu;J.P. Tu;C.F. Hong;C.D. Gu;Y.J. Mai;R. Chen .Improving mechanical properties of a-CN_x films by Ti-TiN/CN_x gradient multilayer[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2010(2):487-494. |
| [21] | Fernandez-Ramos C.;Sanchez-Lopez JC.;Belin M.;Donnet C.;Pascaretti F. Fernandez A. .Tribological and mechanical properties of CNx- and SiCNx-TiN/Ti multilayered systems grown onto steel[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2002(3/4):551-558. |
| [22] | Liu, D.G.;Tu, J.P.;Zhang, H.;Chen, R.;Gu, C.D. .Microstructure and mechanical properties of carbon nitride multilayer films deposited by DC magnetron sputtering[J].Surface & Coatings Technology,2011(8/9):3080-3086. |
| [23] | 刘家浚.材料磨损原理及其耐磨性[M].北京:清华大学出版社,1993:11. |
| [24] | 全永昕.工程摩擦学[M].杭州:浙江大学出版社,1994:11. |
| [25] | Kato K;Umehara N;Adachi K .Friction,wear and N2 lubrication of carbon nitride coatings:a review[J].WEAR,2003,254:1062-1069. |
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