用脉冲激光蒸发熔融织构靶材在SrTiO3(001)单晶基片上制备了YBa2Cu3O7-δ超导薄膜.用X-射线衍射仪、透射电镜和原子力显微镜分别对薄膜的微观结构和表面形貌进行了分析.结果表明,薄膜呈c轴取向,薄膜中产生了一定数量的颗粒状Y2O3杂相,且具有择优取向,而靶材中所含的Y2BaCuO8相却没有在薄膜中形成,沉积温度升高,有利于[001]取向的Y2O3的形成,但不利于[111]取向Y2O3的形成,与传统的粉末烧结靶相比,用熔融织构靶制备YBa2Cu3O7-δ薄膜可以明显抑制薄膜表面颗粒的形成.
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