介质阻挡放电等离子体(Dielectric barrier discharge plasma,DBDP)是一种在大气压下即可发生的低温等离子体,具有电子浓度大、电子平均能量高的特点,因此,DBDP应用在材料制备中具有独特的优势.综述了DBDP的发展历史、产生机理和基本特征、放电参数及其影响等,重点介绍了DBDP在臭氧发生、有机物合成、薄膜制备、材料表面改性、高能球磨等领域的应用,分析了研究中存在的主要问题及相应的解决方法,以期为相关领域的研究提供参考.
参考文献
[1] | 王燕,赵艳辉,白希尧,张芝涛.DBD等离子体及其应用技术的发展[J].自然杂志,2002(05):277-282. |
[2] | 甄汉生.离子体加工技术[M].北京:清华大学出版社,1990 |
[3] | Kogelschatz U. .Dielectric-barrier discharges: Their history, discharge physics, and industrial applications [Review][J].Plasma Chemistry and Plasma Processing,2003(1):1-46. |
[4] | Kanazawa S et al.Stable glow plasma at atmospheric pressure[J].Journal of Physics D:Applied Physics,1988,21(05):838. |
[5] | Masuda S.;Akutsu K. .A ceramic-based ozonizer using high-frequency discharge[J].IEEE Transactions on Industry Applications,1988(2):223-231. |
[6] | Wagner HE.;Brandenburg R.;Kozlov KV.;Sonnenfeld A.;Michel P.;Behnke JF. .The barrier discharge: basic properties and applications to surface treatment[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2003(3):417-436. |
[7] | 徐学基 等.Ar-Hg非平衡态等离子体动态原子和准分子占居数的计算[J].复旦学报(自然科学版),1995,34(01):78. |
[8] | Massines F.;Decomps P.;Gadri RB.;Segur P.;Mayoux C.;Rabehi A. .Experimental and theoretical study of a glow discharge at atmospheric pressure controlled by dielectric barrier[J].Journal of Applied Physics,1998(6):2950-2957. |
[9] | Kunhardt E.E. .Generation of large-volume, atmospheric-pressure, nonequilibrium plasmas[J].IEEE Transactions on Plasma Science,2000(1):189-200. |
[10] | 罗毅,方志,邱毓昌.材料性质对介质阻挡放电特性的影响[J].绝缘材料,2003(04):45-47. |
[11] | 王辉,方志,孙岩洲,邱毓昌.管状电极介质阻挡放电和介质阻挡电晕放电的研究[J].高压电器,2006(02):128-130. |
[12] | Eliasson B.;Kogelschatz U. .Modeling and applications of silent discharge plasmas[J].IEEE Transactions on Plasma Science,1991(2):309-323. |
[13] | Eliasson B.;Kogelschatz U. .Nonequilibrium volume plasma chemical processing[J].IEEE Transactions on Plasma Science,1991(6):1063-1077. |
[14] | W. J. M. Samaranayake;Y. Miyahara;T. Namihira;S. Katsuki;R. Hackam;H. Akiyama .Ozone production using pulsed dielectric barrier discharge in oxygen[J].IEEE transactions on dielectrics and electrical insulation: A publication of the IEEE Dielectrics and Electrical Insulation Society,2000(6):849-854. |
[15] | Eremeev A P;Luk' yanov V B et al.Determination of volume flow rate of a gas[J].Ind Lab,1974,40(09):39. |
[16] | Goossens O.;Vangeneugden D.;Van de Leest R.;Leys C.;Dekempeneer E. .Application of atmospheric pressure dielectric barrier discharges in deposition, cleaning and activation[J].Surface & Coatings Technology,2001(0):474-481. |
[17] | Segers M;Dhali S K .Thin film deposition using a dieleetric barrier discharge[J].Journal of the Electrochemical Society,1991,138(09):2741. |
[18] | Yasushi Sawada;Satoru Ogawa;Masubiro Kogoma .Synthesis of plasma-polymerized tetraethoxysilane and hexamethyldisiloxane films pepared by atmospheric pressure glow diseharge[J].Journal of Physics D:Applied Physics,1995,28:1661. |
[19] | Thyen R;Weber A;Klages CP .Plasma-enhanced chemical-vapour-deposition of thin films by corona discharge at atmospheric pressure[J].Surface & Coatings Technology,1997(1/3):426-434. |
[20] | Schmidt-Szalowski K;Rzanek-Boroch Z;Sentek J et al.Thin films deposition from hexamethyldisiloxane and hexamethyl-disilazane under dielectric-barrier discharge(DBD)conditions[J].Plasmas and Polymers,2000,5(3/4):173. |
[21] | Jiang Nan;Qian Shengfa;Wang Long .Localized material growth by a dielectric barrier discharge[J].Thin Solid Films,2001,390(1-2):119. |
[22] | 严志云,刘安华,贾德民.低温等离子体技术在聚合物材料表面改性中的应用[J].高技术通讯,2004(04):107-107. |
[23] | 胡建杭,方志,章程,赵龙章.介质阻挡放电材料表面改性研究进展[J].材料导报,2007(09):71-76. |
[24] | Friedrich J.;Unger W.;Lippitz A.;Wittrich H.;Wigant L. .Corona, spark and combined UV and ozone modification of polymer films WeBP23[J].Surface & Coatings Technology,1998(1/3):879-885. |
[25] | Danish N;Garg M K;Rane R S et al.Surface modification of Angora rabbit fibers using dielecric barrier discharge[J].Applied Surface Science,2007,253:6915. |
[26] | 方志,王辉,邱毓昌.多针-平板介质阻挡放电提高玻璃表面憎水性的研究[J].绝缘材料,2005(04):23-26,31. |
[27] | P. Rehn;W. Vioel .Dielectric barrier discharge treatments at atmospheric pressure for wood surface modification[J].Holz als Roh- und Werkstoff,2003(2):145-150. |
[28] | 戴乐阳,曾美琴,童燕青,欧阳柳章,朱敏,李元元.基于外场辅助的机械合金化研究[J].功能材料,2005(08):1158-1161. |
[29] | L.Y. Dai,B. Cao,M. Zhu.COMPARISON ON REFINEMENT OF IRON POWDER BY BALL MILLING ASSISTED BY DIFFERENT EXTERNAL FIELDS[J].金属学报(英文版),2006(06):411-417. |
[30] | 戴乐阳,曹彪,曾美琴,欧阳柳章,朱敏.用于材料表面改性的空气介质阻挡放电发射光谱研究[J].中国表面工程,2007(02):11-16. |
[31] | Zhu M;Dai L Y;Gu N S.Synergism of mechanical milling and dielectric barrier discharge plasma on thefabrication of nano-powders of pure metals and tungsten carbide[J].Journal of Alloys and Compounds,2009(478):624. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%