超声喷雾热解法制备稀磁掺杂ZnO薄膜的研究

人工晶体学报, 2013, 42(4): 659-663.

超声喷雾热解法制备稀磁掺杂ZnO薄膜的研究

王礼慧 ^1, , 张灿云 ^2, , 徐家跃 ^3, , 曲红旭 ^4, , 刘晟杰 ^5,

1.上海应用技术学院理学院,上海201418

2.上海应用技术学院理学院,上海201418

3.上海应用技术学院理学院,上海201418

4.上海应用技术学院理学院,上海201418

5.上海应用技术学院理学院,上海201418

基金项目: 上海应用技术学院大学生科技创新项目资助(DJ2010-51)

关键词：超声喷雾热解法 , 稀磁掺杂 , p型ZnO薄膜

Preparation of Diluted Magnetic ZnO Films by Ultrasonic Spray Pyrolysis

近年来,基于ZnO稀磁半导体在自旋电子器件方面的潜在应用价值,过渡金属掺杂的ZnO材料被广泛研究.但由于p型ZnO材料的制备非常困难,获得具有室温以上居里温度的Mn掺杂p型ZnO基稀磁半导体仍然是个难题.在N-In共掺杂成功实现ZnO薄膜p型掺杂的前期研究基础上,本研究采用超声喷雾热解(USP)法在Si基底上制备了Zn1-x,MnxO系列薄膜样品.X射线衍射表明所有ZnO薄膜样品都具有纤锌矿结构,没有发现其他物相的衍射峰存在.薄膜形貌研究发现,样品中的颗粒分布均匀.磁性测量表明N-Mn-In掺杂的样品显示出室温铁磁性.对N-Mn共掺杂和N-Mn-In掺杂的样品进行热处理后,发现薄膜的铁磁性能与薄膜中的空穴载流子具有直接的关联,这一现象与Mn掺杂的p型ZnO会显示室温铁磁性的理论预测是一致的,并用束缚磁性极化子模型解释了ZnO薄膜的铁磁性来源.

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