利用磁控溅射法在SiC纤维上沉积Ti--6Al--4V涂层制备成先驱丝. 在功率密度一定时, 沉积速率和工作气压有关. 环境温度对涂层表面形貌及涂层与纤维结合的影响较大. 涂层成分接近Ti--6Al--4V, 沿涂层厚度方向成分分布均匀. 涂层中柱晶晶粒尺寸为20---50 nm, 为α--Ti固溶体.
The effects of sputtering parameters on the microstructure of Ti--6Al--4V coating on SiC(f) prepared by magnetron sputtering were studied. The results show that the deposition rate is related to the working pressure at a given power density. The morphology of the deposited layer and its binding with the fibre are dependent on temperature. The composition of the coat is close to Ti--6Al--4V, and is uniform throughout the thickness of the coat. The deposited layer consists of crystallites with nonequilibrium hcp structure with grain size of 20---50 nm. The interface between SiC fibre and Ti--6Al--4V coating was investigated by scanning electron microcopy and energy dispersive X--ray spectroscopy. The examination reveals no chemical reaction at the fibre--coat interface which is in nature a sharp interface formed by bonding of the two substances.
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