利用原位光发射谱对衬底附近的化学气相性质进行了研究．研究表明，氮气的引入使得金刚石生长的气相化学和表面化学性质发生了很大变化．含氮基团的萃取作用提高了金刚石表面氢原子的脱附速率，从而提高了金刚石膜的生长速率．而含氮基团的选择吸附使金刚石（１００）取向变得化学糙化，这种化学糙化使得（１００）晶面生长速率远大于其它晶面，最终使金刚石薄膜呈现（１００）织构．还利用化学气相沉积方法研究了氮气浓度对金刚石生长的影响，结果与光发射谱分析是一致的．
Optical emission spectra were applied to detect the chemical radicals in the system. It is shown that
the additional nitrogen makes the chemical radicals and surface activity of diamond films change tremendously. Nitrogenous species
abstract the atomic hydrogen on the diamond surface and speed up the desorption rate of H, so as to promote the diamond films deposition.
Further more, the selective absorption of nitrogenous species causes the (100) facets chemical roughening, which makes the growth rate of
(100) facet higher than that of other facets and leads to the presence of (100) textured diamond films. The effects of nitrogen
addition in CH4/H2 gas mixtures on morphology, quality and growth rate of polycrystalline diamond films prepared by hot filament chemical
vapor deposition (HFCVD) were also studied. The results agree with the analysis of the optical emission spectra.
参考文献
| [1] | Locher R, Wild C, Herres N, et al. Appl. Phys. Lett., 1994, 65: 34--36. [2] Silva F, Gicquel A, Tardieu A, et al. Diamond Relat. Mater., 1996, 5: 338--344. [3] Muller-Sebert W, Worner E, Fuchs F, et al. Appl. Phys. Lett., 1996, 68: 759--760. [4] Alnot P, Chatei H, Bougdira J, et al. Diamond Relat. Mater., 1997, 6: 107--119. [5] Cao G Z, Schermer J J, Van Enckevort W J P, et al. J. Appl. Phys., 1996, 79: 1357--1364. [6] Jin S, Moustakas T D. Appl. Phys. Lett., 1994, 65: 403--405. [7] Bohr S, Harbner R, Lux B. Appl. Phys. Lett., 1996, 68: 1075--1077. [8] Badzian A, Badzian T. Appl. Phys. Lett., 1993, 62: 3432--3434. [9] Kampas F J. J. Appl. Phys., 1983, 54: 2276--2280. [10] Shigesato Y, Boekenhauer R E, Sheldon B W. Appl. Phy. Lett., 1993, 63: 314--316. [11] Drift A van der. Philips Res. Rep., 1967, 22: 267--288. [12] Y Bar-Yam, Moustakas T D. Nature, 1989, 341: 786--787. [13] Sidgwick N V. The Organic Chemistry of Nitrgen (Clarendon. Oxford, 1942), 301. [14] 王季陶，张卫，刘志杰. 金刚石低压气相生长的热力学耦合模型. ?北京: 科学出版社，1998. 129. [15] Samienski R, Haug C, Brenn R, et al. Appl. Phys. Lett., 1995, 67: 19--21. [16] Gardenier J G E, Maas W E J R, VanMeerten R Z C, et al. J. Cryst. Growth, 1989, 96: 832--842. [17] Handbook of Chemistry and Physics, 70th ed., edited by R. C. Weast, D. R. Lide, M. J. Astle. and W. H. Beyer(CRC, Boca Raton, FL,1989), P.F-198. [18] Giling L J, Van Enckevort W J P. Surf. Sci., 1985, 161: 567--583. |
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