STUDY ON COMPOSITION, MICROSTRUCTURE AND HARDNESS OF DLC FILMS BY VCAD

金属学报(英文版), 2003, 16(4): 271-275.

^1, , ^2, , ^3, , ^4, , ^5, , ^6, , ^7,

1.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

2.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

3.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

4.Institute of Materials Science & Technology, College of Mechanical Engineering, South China University of Technology, Guangzhou 510640, China

5.Guangzhou Research Institute of Non-Ferrous Metals, Guangzhou 510651, Chiua

6.Guangzhou Research Institute of Non-Ferrous Metals, Guangzhou 510651, Chiua

7.Guangzhou Research Institute of Non-Ferrous Metals, Guangzhou 510651, Chiua

基金项目: 广东省纳米材料科技计划教育部科研项目广东省科技攻关项目广东省自然科学基金

STUDY ON COMPOSITION, MICROSTRUCTURE AND HARDNESS OF DLC FILMS BY VCAD

Keywords： DLC films

DLC super-hard films have been deposited on the substrates of single crystalline Si, pure Ti and stainless steel 18-8 by a method of vacuum cathode arc deposition(VCAD). The composition, microstructure and micro-hardness of the films have been studied in this paper. The results indicate that hardness of the DLC films is different on the different substrates. Hardness of the films increases with decreasing in surface roughness of the films. The maximum value of micro-hardness belongs to the DLC films deposited under the hydrogen pressure of 0.35Pa and the negative bias of 100V.

参考文献

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STUDY ON COMPOSITION, MICROSTRUCTURE AND HARDNESS OF DLC FILMS BY VCAD

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