采用磁控溅射技术在高速钢和单晶硅基体制备了不同碳含量的CrTiAlCN复合镀层,利用XRD、XPS、SEM分析了镀层的相结构、元素存在状态及截面显微形貌,通过销-盘式摩擦磨损试验机研究了镀层的摩擦系数。结果表明,镀层主要由CrN结构的化合物相组成;随着碳含量的增加,镀层中的sp2碳键含量增加,镀层逐渐开始非晶化,镀层更加致密。镀层的摩擦系数随碳含量的增加而下降,当碳含量为50.47 at%时,镀层摩擦系数降至0.1。
Influence of carbon content on microstructure and frictional behavior of CrTiAlCN coatings,which was deposited on high speed steel and silicon wafer substrates by magnetron sputtering,was studied.The phase,elementary state and cross-section morphology of the CrTiAlCN coatings were analyzed by XRD,XPS and SEM,respectively.Friction coefficient of the coatings was studied by a pin-on-disk tester.The results show that the mainly phase of coatings is CrN.With the increase of carbon content,sp2 carbon bond of the coatings is increased,and amorphization of the CrTiAlCN coatings appears gradually.Meanwhile,the friction coefficient of the coatings descends from 0.5 to 0.1 when the carbon content increases from zero to 50.47 at%.
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