本文探讨了激光椭圆仪对离子注入金属表层的分析方法。实验结果表明,赝介电虚(?)值的变化可以提供金属表层由晶态到非晶态转变的信息。
An ellipsometric method is prcscnted for the analysis of the ion-implanted surface layer on metal. Experimental results indicate that the variation of the pseudo-imaginary part of the dielectric function can give the information about the transformation from the crystalline into amorphous state of the surface layer on rectal by ion implantation.
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