对近几年透明氧化物薄膜的制备进行了综述,重点介绍了溶胶-凝胶法、电沉积法、水热电化学法和喷雾热解法等方法的制备特点、性能评价以及透明氧化物薄膜的应用领域,并对今后透明氧化物薄膜的制备发展趋势进行了预测.
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