化学法动态热处理制备LZO缓冲层

稀有金属材料与工程, 2013, 42(9): 1953-1956.

化学法动态热处理制备LZO缓冲层

于泽铭 ^1, , 金利华 ^2, , 王耀 ^3, , 李成山 ^4, , 张平祥 ^5,

1.西北有色金属研究院,陕西西安710016

2.西北有色金属研究院,陕西西安710016

3.西北有色金属研究院,陕西西安710016

4.西北有色金属研究院,陕西西安710016

5.西北有色金属研究院,陕西西安710016

基金项目: 十一五"863"项目(2006AA03Z204,2008AA03Z202)

关键词： La2Zr2O7(LZO)缓冲层 , 化学溶液沉积技术 , 动态热处理

Deposition of La2Zr2O7 (LZO) Buffer Layer by a Reel-to-Reel Method

Yu Zeming ^1, , Jin Lihua ^2, , Wang Yao ^3, , Li Chengshan ^4, , Zhang Pingxiang ^5,

1.西北有色金属研究院,陕西西安710016

2.西北有色金属研究院,陕西西安710016

3.西北有色金属研究院,陕西西安710016

4.西北有色金属研究院,陕西西安710016

5.西北有色金属研究院,陕西西安710016

Keywords： La2Zr2O7 (LZO) buffer layer , chemical solution deposition , reel-to-reel method

对采用化学溶液沉积技术动态热处理制备La2Zr2O7(LZO)缓冲层进行了研究.结果显示,制备长样品时,侧向进气更有利于驱散热解气体,降低样品织构的不均匀性.当侧向进气方向与样品表面法线方向夹角较小时,更有利于提高LZO缓冲层的织构特性.LZO缓冲层的织构和表面形貌受样品移动速度影响的主要原因是样品移动速度的变化直接改变了样品的热处理时间.优化动态热处理过程后制备出的LZO缓冲层表面致密,LZO缓冲层具有锐利的立方织构,织构锐利度与金属基带织构相当.

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