ZnO薄膜是一种具有广泛用途的材料,近来成为了研究的热点.高度c轴择优取向是优质ZnO薄膜的重要特点.在已开发的众多生长技术中,磁控溅射、金属有机物气相沉积、脉冲激光沉积、分子束外延、电子束反应蒸镀法是生长出高度c轴择优取向优质薄膜的主要方法.介绍了这些方法及其研究进展,同时介绍了目前ZnO薄膜主要研究方面.
参考文献
| [1] | King SL.;Boyd IW.;Gardeniers JGE. .PULSED-LASER DEPOSITED ZNO FOR DEVICE APPLICATIONS[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1996(0):811-818. |
| [2] | Srikant V.;Clarke DR. .On the optical band gap of zinc oxide[J].Journal of Applied Physics,1998(10):5447-5451. |
| [3] | Jin B J;Bae S H;Lee S Y et al.Effects of native defects on optical and electrical properties of ZnO prepared by pulsed laser deposition[J].Materials Science and Engineering B,2000,71(1-3):301. |
| [4] | Dutta S;Jackson H E et al.Scatter loss reduction in ZnO optical waveguides by laser annealing[J].Applied Physics Letters,1981,39:206. |
| [5] | Horsthuis W H G .ZnO processing for integrated optic sensors[J].Thin Solid Films,1986,137:185. |
| [6] | Kim KH.;Ma DY.;Park KC. .STRUCTURAL, ELECTRICAL AND OPTICAL PROPERTIES OF ALUMINUM DOPED ZINC OXIDE FILMS PREPARED BY RADIO FREQUENCY MAGNETRON SPUTTERING[J].Journal of Applied Physics,1997(12):7764-7772. |
| [7] | Tikio N;Tomoyuki K;Takahiro M et al.Superstrate type Cu(In,Ga) Se2 thin film solar cells with ZnO buffer layers[J].Japanese Journal of Applied Physics Part 2,1998,37:L499. |
| [8] | Sang B;Yamada A;Konagai Ml .Textured ZnO thin films for solar cells grown by a two-step process with the atomic layer deposition technique[J].Japanese Journal of Applied Physics Part 2,1998,37:2B:L206. |
| [9] | Liang S;Sheng H;Liu Y et al.ZnO schottky ultraviolet photodetectors[J].Journal of Crystal Growth,2001,225:110. |
| [10] | Gardeniers JGE.;Burger GJ.;Rittersma ZM. .Preferred orientation and piezoelectricity in sputtered ZnO films[J].Journal of Applied Physics,1998(12):7844-7854. |
| [11] | Mitra P;Chatterjee A P;Maiti H S .ZnO thin film sensor[J].Materials Letters,1998,35:33. |
| [12] | Walter Water;Sheng-Yuan Chu .Physical and structural properties of ZnO sputtered films[J].Materials Letters,2002(1/2):67-72. |
| [13] | Jeong WJ.;Park GC. .Electrical and optical properties of ZnO thin film as a function of deposition parameters[J].Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion,2001(1/4):37-45. |
| [14] | Y. LIU;C.R. GORLA;S. LIANG .Ultraviolet Detectors Based on Epitaxial ZnO Films Grown by MOCVD[J].Journal of Electronic Materials,2000(1):69-74. |
| [15] | Hayamizu S.;Tanaka H.;Kawai T.;Tabata H. .PREPARATION OF CRYSTALLIZED ZINC OXIDE FILMS ON AMORPHOUS GLASS SUBSTRATES BY PULSED LASER DEPOSITION[J].Journal of Applied Physics,1996(2):787-791. |
| [16] | H. Kim;C. M. Gilmore;J. S. Horwitz .Transparent conducting aluminum-doped zinc oxide thin films for organic light-emitting devices[J].Applied physics letters,2000(3):259-261. |
| [17] | Verardi P.;Andrei A.;Dinescu M. .CHARACTERIZATION OF ZNO THIN FILMS DEPOSITED BY LASER ABLATION IN REACTIVE ATMOSPHERE[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,1996(0):827-830. |
| [18] | Joseph M.;Saeki H.;Ueda K.;Kawai T.;Tabata H. .Fabrication of the low-resistive p-type ZnO by codoping method[J].Physica, B. Condensed Matter,2001(0):140-148. |
| [19] | Tang ZK.;Yu P.;Kawasaki M.;Ohtomo A.;Koinuma H.;Segawa Y.;Wong GKL. .Room-temperature ultraviolet laser emission from self-assembled ZnO microcrystallite thin films[J].Applied physics letters,1998(25):3270-3272. |
| [20] | Bagnall DM.;Zhu Z.;Yao T.;Shen MY.;Goto T.;Chen YF. .High temperature excitonic stimulated emission from ZnO epitaxial layers[J].Applied physics letters,1998(8):1038-1040. |
| [21] | Makino T.;Segawa Y.;Chia CH.;Yasuda T.;Kawasaki M.;Ohtomo A.;Tamura K.;Koinuma H.;Isoya G. .Optical spectra in ZnO thin films on lattice-matched substrates grown with laser-MBE method[J].Journal of Crystal Growth,2000(0):289-293. |
| [22] | Wu HZ.;Qiu DJ.;Huang DM.;He KM. .Low-temperature epitaxy of ZnO films on Si(001) and silica by reactive e-beam evaporation[J].Journal of Crystal Growth,2000(1/2):131-137. |
| [23] | 蒋向东,张怀武,黄祥成.透明导电半导体ZnO膜的研究[J].应用光学,2002(02):35-38. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%