改进的溶胶-凝胶法制备不同厚度的PZT薄膜

功能材料, 2004, 35(z1): 3224-3227.

改进的溶胶-凝胶法制备不同厚度的PZT薄膜

刘梦伟 ^1, , 佟建华 ^2, , 王兢 ^3, , 董维杰 ^4, , 崔天宏 ^5, , 王立鼎 ^6,

1.大连理工大学,微系统中心,辽宁,大连,116023

2.大连理工大学,微系统中心,辽宁,大连,116023

3.大连理工大学,电子工程系,辽宁,大连,116023

4.大连理工大学,电子工程系,辽宁,大连,116023

5.Department of Mechanical Engineering, University of Minnesota, 111 Church Street SE, Minneapolis, MN 55455, USA

6.大连理工大学,微系统中心,辽宁,大连,116023

基金项目: 国家自然科学基金(90207003)

关键词：溶胶-凝胶 , PZT薄膜 , 厚度 , 介电性能

Fabrication of the PZT films of various thickness by a modified sol-gel method

采用改进的溶胶-凝胶技术,在Pt(111)/Ti/SiO2/Si(100)基底上制备了不同厚度的Pb(Zr0.50Ti0.50)O3薄膜,在600℃的退火条件下获得了晶格完善的钙钛矿结构.通过前驱体溶液的差热(DTA)、热重(TGA)实验以及PZT膜加热到不同温度的物相转化分析了PZT薄膜的相结构演化过程.采用X射线衍射仪和扫描电子显微镜表征了PZT薄膜的物相和微观形貌,用HP4194A阻抗分析仪测量了薄膜的介电性能.实验结果表明,随着退火循环次数的增多,PZT(111)相含量增加;薄膜的晶粒大小不随薄膜厚度改变;薄膜晶粒呈柱状生长;薄膜的介电常数随测量频率的增加而降低,随薄膜厚度增加而增加.

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