脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响

表面技术 , 2014, 43(1): 1-39.

脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响

魏永强 ^1, , 张艳霞 ^2, , 文振华 ^3, , 蒋志强 ^4, , 冯宪章 ^5,

1.郑州航空工业管理学院机电工程学院,郑州450015;航空制造及装备河南省高校工程技术研究中心,郑州450015

2.郑州信息科技职业学院机电工程系,郑州450015

3.郑州航空工业管理学院机电工程学院,郑州450015;航空制造及装备河南省高校工程技术研究中心,郑州450015

4.郑州航空工业管理学院机电工程学院,郑州450015;航空制造及装备河南省高校工程技术研究中心,郑州450015

5.郑州航空工业管理学院机电工程学院,郑州450015;航空制造及装备河南省高校工程技术研究中心,郑州450015

基金项目: the Program for Science & Technology Innovative Research Team in University of Henan Province(2012IRTSTHN014) 郑州航院科研创新团队建设项目(2014TD01) 河南省高校科技创新团队支持计划(2012IRTSTHN014) 河南省科技厅基础与前沿技术研究计划(132300410241) the Science and Technology Research Projects of Henan Education Committee(13A430397 and 14A140026) the Natural Science Foundation of China(51105344) 航空科学基金(2012ZE55011) the Aviation Foundation of China(2012ZE55011) Zhengzhou Institute of Aeronautical Industry Management(2014TD01) 河南省教育厅科学技术研究重点项目(13A430397,14A140026) 国家自然科学基金(51105344) the Basic and Frontier Technology Research Foundation of S&T Committee of Henan Province(132300410241)

关键词： TiN/TiAlN , 电弧离子镀 , 纳米硬度 , 微观结构 , 脉冲偏压占空比

Effects of Different Pulsed Bias Duty Cycle on the Microstructure and Hardness of TiN/TiAlN Multilayer Coatings

WEI Yong-qiang ^1, , ZHANG Yan-xia ^2, , WEN Zhen-hua ^3, , JIANG Zhi-qiang ^4, , FENG Xian-zhang ^5,

1.郑州航空工业管理学院机电工程学院,郑州450015;航空制造及装备河南省高校工程技术研究中心,郑州450015

2.郑州信息科技职业学院机电工程系,郑州450015

3.郑州航空工业管理学院机电工程学院,郑州450015;航空制造及装备河南省高校工程技术研究中心,郑州450015

4.郑州航空工业管理学院机电工程学院,郑州450015;航空制造及装备河南省高校工程技术研究中心,郑州450015

5.郑州航空工业管理学院机电工程学院,郑州450015;航空制造及装备河南省高校工程技术研究中心,郑州450015

Keywords： TiN/TiAlN , arc ion plating , nanohardness , microstructure , pulsed bias duty cycle

目的研究脉冲偏压占空比对TiN/TiAlN多层薄膜微观结构和硬度的影响规律.方法利用脉冲偏压电弧离子镀的方法,改变脉冲偏压占空比,在M2高速钢表面制备5种TiN/TiAlN多层薄膜,对比研究了薄膜的微观结构、元素成分、相结构和硬度的变化规律.结果 TiN/TiAlN多层薄膜表面出现了电弧离子镀制备薄膜的典型生长形貌,随着脉冲偏压占空比的增加,薄膜表面的大颗粒数目明显减少.此外,脉冲偏压占空比的增加还引起多层薄膜中Al/Ti原子比的降低.结论 TiN/TiAlN多层薄膜主要以(111)晶面择优取向生长,此外还含有(311),(222)和(200)晶相结构.5种多层薄膜的纳米硬度均在33GPa以上,当脉冲偏压占空比为20％时,可实现超硬薄膜的制备.

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