研究了基片预处理和工艺参数对微波 等 离子化学气相沉积金刚石涂层WC-8.0%Co刀具质量的影响， 研究了提高成核密度和沉积 速 率的方法， 用SEM， XRD， 激光Raman光谱分析了金刚石涂层质量， 用切削试验检测金刚石涂层与刀具基 底的附着情况 。 结果表明， 在1∶3的稀盐酸中酸洗15 min后用 氨水浸泡10 min的基片处理方法能有效地抑制金属钴的溢出， 从而提高金刚石涂层 的质量， 并且使刀具 使用寿命提高10倍以上。
The effects of substrate pretreatment and proces sing parameters on the quality of microwave plasma chemical vapor deposition (MP CVD) diamond coating upon WC-8.0%Co tools, and the method to improv e t he nucleation density and deposition speed were studied. The diamond coatings were analyzed with SEM, XRD and laser Raman's spectrometer, the adhesion of diamond coating w as measured by cutting test. The results show that it can effectively control th e penetration of cobalt and improve the quality of diamond coating and im prove tool's l ife by 10 times when the substrate is pretreated in the condition of acid leachi ng in dilute HCl for 15 min and then soaking in dilute ammonia solution for 10 min.
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