介绍了在不同性质应力(拉应力或压应力)作用下氧化 膜开裂和剥落的方式和特点及发生开裂和剥落的临界温度变化条件.简述了在外加应力作用下氧化膜的破裂行为及改善氧化膜力学完整性的主要方法.
The characteristics of cracking and spalling behavior of thin oxide film are discussed in brief.On the other hand,the critical tempe rature change condition for the cracking and spalling,and the effect of applied stress load on the cracking and spalling of oxide film are also introduced.In the end,measures to improve the mechanical integrity of oxide film are discussed.
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