综述了基于Sol-gel技术的铁电陶瓷厚膜的制备方法.分别从溶胶、热处理工艺和成膜技术等3个方面详述了粉末溶胶法、添加有机物溶胶法等改进的溶胶法,一步烧结法、快速成膜法等改进的热处理工艺法以及界面聚合术等新型的成膜技术,讨论了这些制备陶瓷厚膜方法的优缺点,并对基于Sol-gel技术陶瓷厚膜的制备这一研究领域进行了展望.
参考文献
[1] | Jones R;Desu S .Process integration for nonvolatile ferroelectric memory[J].MRS Bulletin,1996,21(06):55. |
[2] | 张红芳,张良莹,姚熹.改进的Sol-gel法制备Ba0.6 Sr0.4 TiO3厚膜[J].材料导报,2005(05):102-104,96. |
[3] | Jenkins D F L et al.PZT thin film Bi-layer devices for phase controlled actuation in MEMS[J].J Electro Ceram,2001,7(01):5. |
[4] | Hu S H;Meng X J;Hu G J et al.Preparation and optical waveguide property of metal alkoxide solution derived Pb(Zr0.5 Ti0.5O5)thick films[J].Applied Physics Letters,2004,84(18):3609. |
[5] | A. Roemer;E. Millon;B. Vincent;A. Boudrioua;O. Pons-Y-Moll;R. M. Defourneau;W. Seiler .Epitaxial PbTiO_(3) thin films grown on (100) MgO by pulsed-laser deposition for optical waveguiding properties[J].Journal of Applied Physics,2004(6):3041-3047. |
[6] | Varadan V K;Vinoy K J;Hargsoon Y.Application of MEMS in microwave and millimeter wave systems[M].Melbourne,Australia,2001:179. |
[7] | Gun BHAKDISONGKHRAM;Youji YAMASHITA;Takashi NISHIDA;Tadashi SHIOSAKI .Dependence of Microwave Properties of Ba_xSr_(1-x)TiO_3 Thin Films on Substrate[J].Japanese journal of applied physics,2005(9B):7098-7102. |
[8] | Xu BM.;Bernstein JJ.;Cross LE. .Ferroelectric and antiferroelectric films for microelectromechanical systems applications[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(0):712-718. |
[9] | X. Lansiaux;E. Dogheche;D. Remiens;M. Guilloux-viry;A. Perrin;P. Ruterana .LiNbO_(3) thick films grown on sapphire by using a multistep sputtering process[J].Journal of Applied Physics,2001(10):5274-5277. |
[10] | Goux L.;Gervais M.;Catherinot A.;Champeaux C.;Sabary F. .Crystalline and electrical properties of pulsed laser deposited BST on platinized silicon substrates[J].Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites,2002(1):194-200. |
[11] | Tombak A;Maria J P et al.Tunable barium strontium titanate thin film capacitors for RF and microwave applications[J].IEEE Microwave and Wireless Components Letters,2002,12:3. |
[12] | Zhihong W;Changlei Z et al.Processing and characterization of Pb(Zr,Ti)O3 thick films on platinum-coated silicon substrate derived from Sol-gel deposition[J].Materials Chemistry and Physics,2002,75:71. |
[13] | Ren T R et al.Characteristics of silicon based BaxSr1-x-TiO3 thin films prepared by a SOl-gel method[J].Journal of Physics D:Applied Physics,2002,35:923. |
[14] | Barrow D A;Petroff T E;Sayer M .Thick ceramic coatings using a Sol-gel based ceramic-ceramic 0-3 composite[J].Surface and Coatings Technology,1995,76-77(11):113. |
[15] | Corker D L;Zhang Q;Whatmore R W .PZT "composite" ferroelectric thick films[J].Journal of the European Ceramic Society,2002,22:383. |
[16] | Dorey R A;Stringfellow S B;Whatmore R W .Effect of sintering aid and repeated sol infiltrations on the dielectric and piezoelectric properties of a PZT composite thick film[J].Journal of the European Ceramic Society,2002,22:2921. |
[17] | Oliver Huang;Amit Bandyopadhyay;Susmita Bose .Influence of processing parameters on PZT thick films[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2005(1):19-24. |
[18] | Dongling X et al.Fabrication and electrical properties of lead zirconate titanate thick film using a new Sol-gel processing technique[J].Journal of Materials Science,2001,12:587. |
[19] | 于光龙,肖定全,朱建国,余萍,袁小武.粉末溶胶法制备Pb0.90La0.10Ti0.975O30-3型厚膜的研究[J].功能材料,2003(02):194-196. |
[20] | Dorey R A;Whatmore R W .Pyroelectric properties of PZT/PMNZTU composite thick films[J].J Electro Ceram,2004,12:191. |
[21] | 陈书厅,姚熹,张良莹.新型sol-gel技术制备BST 0-3型厚膜[J].电子元件与材料,2005(01):19-21. |
[22] | 刘少波,李艳秋,刘梅冬,曾亦可.0-3型(Ba1-x-ySrxPby)(Mn,Ti)O3铁电厚膜的制备与表征[J].微细加工技术,2003(03):31-36. |
[23] | Dorey R A;Whatmore R W .Electroceramic thick film fabrication for MEMS[J].J Electro Ceram,2004,12:19. |
[24] | Tu YL.;Milne SJ. .A STUDY OF THE EFFECTS OF PROCESS VARIABLES ON THE PROPERTIES OF PZT FILMS PRODUCED BY A SINGLE-LAYER SOL-GEL TECHNIQUE[J].Journal of Materials Science,1995(10):2507-2516. |
[25] | Xu Baomin .Synthesis of Lead Zirconate Titanate Stannate Antiferroelectric Thick Films by Sol-Gel Processing[J].Journal of the American Ceramic Society,1999(1/3):306-312. |
[26] | Yi H .Preparation of stabilized Pb(Zn1/3 Nb2/3)O3(PZN)films by the sol-gel method[J].Journal of Materials Science,1996,31:4255. |
[27] | Pramod K;Varadan V K et al.Optical,dielectric and fatigue properties of sol-gel-derived 2μm thick Pb(Zr0.53 Ti0.47)O3ferroelectric films[J].Smart Materials and Structures,2002,11:956. |
[28] | Kozuka H;Isota Y;Hosokawa M .Single-step deposition of crack-free,thick ceramic films aided by polyvinylpyrrolidone[J].British Ceramic Transactions,2001,112:335. |
[29] | Kozuka H;Higuchi A .Single layer submicron thick BaTiO3coatings from PVP-containing sols:gel-to-ceramic film conversion,densification and dielectric properties[J].Journal of Materials Research,2001,16:3116. |
[30] | Takenaka S;Kozuka H .Sol-gel preparation of single-layer,0.75μm thick lead zirconate titanate films from lead nitratetitanium and zirconium alkoxide solutions containing polyvinylpyrrolidone[J].Applied Physics Letters,2001,79:3485. |
[31] | Kozuka H;Takenaka S;Tokita H et al.Stress and cracks in gel-derived ceramic coatings and thick film formation[J].Journal of Sol-Gel Science and Technology,2003,26:681. |
[32] | Kozuka H;Takenaka S;Tokita H .PVP-assisted sol-gel deposition of single layer ferroelectric thin films over submicron or micron in thickness[J].Journal of the European Ceramic Society,2004,24:1585. |
[33] | Seveno R;Limousin P;Averty D et al.Preparation of multi-coating PZT thick films by sol-gel method onto stainless steel substrates[J].Journal of the European Ceramic Society,2000,20:2025. |
[34] | Zheyao W;Jianshe L;Tianling R et al.Fabricotion of organic PVP doping-based Ba0.5St0.5TiO3 thick films on silicon substrates for MEMS applications[J].Sensors and Actuators A:Physical,2005,117:293. |
[35] | 车俊,姚熹,史鹏.聚乙烯吡咯烷酮为稳定剂的PZT厚膜制备与性能[J].空军工程大学学报(自然科学版),2005(03):82-84. |
[36] | Kozuka H;Kajimura M;Hirano T et al.Crack-free,thick ceramic coating films via non-repetitive dip-coating using polyvinylpyrrolidone as stress-relaxing agent[J].Journal of Sol-Gel Science and Technology,2000,19:205. |
[37] | Kozuka H;Kajimura M et al.Single-step dip-coating of crack free BaTiO3 films>1μm thick:effect of polyvinylpyrrolidone on critical thickness[J].Journal of the American Ceramic Society,2000,83:1056. |
[38] | Pu XH.;Ding A.;Tian HY.;Qiu PS.;Luo WG. .One-step firing process in synthesis of sol-gel derived PZT thick films[J].Physica Status Solidi, A. Applied Research,2000(2):R10-R12. |
[39] | Xinghua Pu;Weigen Luo;Aili Ding;Huyong Tian;Pingsun Qiu .Preparation of PZT thick films by one-step firing sol-gel process[J].Materials Research Bulletin: An International Journal Reporting Research on Crystal Growth and Materials Preparation and Characterization,2001(7-8):1471-1478. |
[40] | Xi Yue;Dingquan Xiao;Jian Cao .The crystalline and dielectric properties of (1-x)Pb(Sc_(1/2)Ta_(1/2))O_3-(x)PbTiO_3 ceramics prepared by one-step-sintering-method[J].Ceramics International,2004(7):1905-1908. |
[41] | 陈超,褚家如,鲁健.基于溶胶-凝胶技术的PZT厚膜快速成膜研究[J].微细加工技术,2005(01):58-62. |
[42] | Chen SY.;Chen IW. .Texture development, microstructure evolution, and crystallization of chemically derived PZT thin films[J].Journal of the American Ceramic Society,1998(1):97-105. |
[43] | Dorey R A;Stringfellow S B et al.Effect of sintering aid and repeated sol infiltrations on the dielectric and piezoelectric properties of a PZT composite thick film[J].Journal of the European Ceramic Society,2002,22:2921. |
[44] | Kholkin A L;Yarmarkin V K;Wu A et al.PZT-based piezoelectric composites via a modified Sol-gel route[J].Journal of the European Ceramic Society,2001,21:1535. |
[45] | Dorey R A;Whatmore R W;Beeby S P et al.Screen printed PZT thick films using composite film technology[J].Integrated Ferroelectrics,2003,54:651. |
[46] | Kobayashi M;Golding T R;Sayer M et al.Piezoelectric thick film ultrasonic transducers fabricated by a sol-gel spray technique[J].Ultrasonics,2002,39:675. |
[47] | Hale J M;White J R.Proceedings of the institution of mechanical engineers[J].J Mechanic Eng Sci,2005(C):219. |
[48] | Ozawa S;Yamane M.Piezoelectric properties of PZT thick film on Si prepared by an interfacial polymerization method[A].,2001:89. |
[49] | Tsurumi T;Ozawa S;Satoshi W .Preparation of PZT thick films by an interfacial polymerization method[J].Journal of Sol-Gel Science and Technology,2003,26:1037. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%