用射频等离子体方法在玻璃基底上制备了类金刚石薄膜.分析了γ射线辐照类金刚石薄膜(以下简称DLC薄膜)的结构与特性改变.采用Raman及红外光谱进行结构分析表明:随辐照剂量的增加,在膜中出现SP3C-H及SP2C-H键的断裂与减少,SP3C-C键的略微增加.当辐照剂量达10×104Gy时,SP3C-H键减少约50%,与此同时,出现膜中氢的重新键合,并从中释出.γ射线辐照使DLC薄膜的电阻率呈上升趋势,膜的类金刚石特征更加明显,结构得到改善.本文对γ射线对DLC薄膜的辐照机制进行了简要的讨论.
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