与一般的金属(Al,Cu,Ag和Au)及其硅化物相比,过渡金属硅化物具有更高的电导率和良好的热稳定性,受到广泛关注.其中,稀土金属与硅形成的稀土硅化物具有优异的光学、电子学性质,对新功能材料的开发起到重要作用.本文综述了稀土硅化物的特性、制备技术及其进展.介绍了稀土金属硅化物在器件方面的应用.
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