采用化学镀法在p型单晶硅片表面制备了2种镍-钴-磷合金镀层,对比研究了其显微组织和耐蚀性.结果表明,Ni48Co46P6镀层为非晶和纳米晶混合结构,表面均匀分布着粒径0.2～3.5 μm的球状团簇；而Ni12Co84P4镀层为单相密排六方结构,平均晶粒尺寸约16nm,表面由长约1.0 μm的梭状团簇组成.在10.0％ NaOH溶液和3.5％ NaCl溶液中,2种镀层的极化曲线均存在明显的钝化区域,且Ni48Co46P6镀层的耐蚀性较好；而在1.0％ H2SO4溶液中,2种镀层的耐蚀性均大幅下降.
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