采用真空电弧蒸镀技术在高温合金K417上制备Ni+CrAlYSiN纳米复合涂层,用SEM,EDX,TEM等手段表征了复合涂层的形貌、成分和结构,研究了基体负偏压和氮气流量对涂层的形貌、结构、成分和性能的影响.结果表明,涂层主要由γ-Ni,fcc-AlN和fcc-CrN纳米晶组成;基体偏压由-100V增至-300V,熔滴的尺寸和数量均减小,涂层中的晶粒尺寸由50 nm减小为30 nm.随着偏压的增大,涂层中N含量下降,Ni含量增加,Cr和Al的含量先增加后减少；涂层的沉积速率下降.随着氮气流量的增加,涂层中的N含量增加,Ni、Cr和A1含量下降；涂层的沉积速率先增加后减小.偏压为-300 V、氮气流量为225mL·min-1时,涂层的硬度达最大值(9.80 GPa),比NiCrAlYSi涂层的硬度提高约60％,而耐磨性提高约30％.
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